Issued Patents All Time
Showing 25 most recent of 76 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12346035 | Process tool for dry removal of photoresist | Dries Dictus | 2025-07-01 |
| 12278125 | Integrated dry processes for patterning radiation photoresist patterning | Jengyi Yu, Samantha Tan, Mohammed Haroon Alvi, Richard Wise, Yang Pan +5 more | 2025-04-15 |
| 12211691 | Dry development of resists | Boris Volosskiy, Samantha Tan, Chenghao Wu, Kevin Li Gu | 2025-01-28 |
| 12183604 | Integrated dry processes for patterning radiation photoresist patterning | Jengyi Yu, Samantha Tan, Mohammed Haroon Alvi, Richard Wise, Yang Pan +5 more | 2024-12-31 |
| 12105422 | Photoresist development with halide chemistries | Samantha Tan, Jengyi Yu, Da Li, Yiwen FAN, Yang Pan +5 more | 2024-10-01 |
| 11942565 | Solar cell emitter region fabrication using substrate-level ion implantation | Staffan Westerberg, David D. Smith | 2024-03-26 |
| 11921427 | Methods for making hard masks useful in next-generation lithography | Katie Lynn Nardi, Chenghao Wu | 2024-03-05 |
| 11437530 | Metallization of solar cells with differentiated p-type and n-type region architectures | David D. Smith, Scott Harrington, Venkatasubramani Balu | 2022-09-06 |
| 11316056 | Solar cell emitter region fabrication using self-aligned implant and cap | — | 2022-04-26 |
| 10224442 | Metallization of solar cells with differentiated P-type and N-type region architectures | David D. Smith, Scott Harrington, Venkatasubramani Balu | 2019-03-05 |
| 9829805 | Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor | Timothy Michaelson, Barry Chin, Majeed A. Foad, Paul Deaton | 2017-11-28 |
| 9716205 | Solar cell emitter region fabrication using ion implantation | David D. Smith | 2017-07-25 |
| 9632411 | Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor | Timothy Michaelson, Barry Chin, Majeed A. Foad, Paul Deaton | 2017-04-25 |
| 9577126 | Solar cell emitter region fabrication using ion implantation | David D. Smith, Staffan Westerberg | 2017-02-21 |
| 9577134 | Solar cell emitter region fabrication using self-aligned implant and cap | — | 2017-02-21 |
| 9502601 | Metallization of solar cells with differentiated P-type and N-type region architectures | David D. Smith, Scott Harrington, Venkatasubramani Balu | 2016-11-22 |
| 9401450 | Solar cell emitter region fabrication using ion implantation | David D. Smith | 2016-07-26 |
| 9263625 | Solar cell emitter region fabrication using ion implantation | David D. Smith, Staffan Westerberg | 2016-02-16 |
| 9236467 | Atomic layer deposition of hafnium or zirconium alloy films | Timothy Michaelson, Paul F. Ma, Paul Deaton | 2016-01-12 |
| 8821986 | Activated silicon precursors for low temperature deposition | Todd Schroeder, David Thompson, Jeffrey W. Anthis | 2014-09-02 |
| 8673679 | Enhanced vision system for screen printing pattern alignment | Marco Gallazzo, Andrea Baccini, Sunhom Paak, Hongbin Fang, Zhenhua Zhang | 2014-03-18 |
| 8536068 | Atomic layer deposition of photoresist materials and hard mask precursors | Timothy Michaelson, Paul Deaton | 2013-09-17 |
| 8465903 | Radiation patternable CVD film | Timothy Michaelson, Paul Deaton, Nitin K. Ingle, Abhijit Basu Mallick, Amit Chatterjee | 2013-06-18 |
| 8440571 | Methods for deposition of silicon carbide and silicon carbonitride films | Todd Schroeder | 2013-05-14 |
| 8308858 | Electroless deposition process on a silicon contact | Michael P. Stewart, Arulkumar Shanmugasundram, David Eaglesham | 2012-11-13 |