| 12510826 |
Photoresist development with halide chemistries |
Sandra Liliana Tan, Jengyi Yu, Da Li, Yiwen FAN, Yan-Quan Pan +5 more |
2025-12-30 |
|
| 12510825 |
Photoresist development with halide chemistries |
Sandra Liliana Tan, Jengyi Yu, Da Li, Yiwen FAN, Yan-Quan Pan +5 more |
2025-12-30 |
|
| 12504692 |
Cyclic development of metal oxide based photoresist for etch stop deterrence |
Da Li, Ji-Yeong Kim, Samantha Tan |
2025-12-23 |
|
| 12436464 |
Pre-exposure photoresist curing to enhance EUV lithographic performance |
Keren Gu, Che Yuen Justin Wu, Katie Lynn Nardi, Boris Volosskiy |
2025-10-07 |
|
| 12346035 |
Process tool for dry removal of photoresist |
Dries Dictus |
2025-07-01 |
|
| 12278125 |
Integrated dry processes for patterning radiation photoresist patterning |
Jengyi Yu, Samantha Tan, Mohammed Haroon Alvi, Richard Wise, Yang Pan +5 more |
2025-04-15 |
|
| 12211691 |
Dry development of resists |
Boris Volosskiy, Samantha Tan, Chenghao Wu, Kevin Li Gu |
2025-01-28 |
|
| 12183604 |
Integrated dry processes for patterning radiation photoresist patterning |
Jengyi Yu, Samantha Tan, Mohammed Haroon Alvi, Richard Wise, Yang Pan +5 more |
2024-12-31 |
$116,387,000 |
| 12105422 |
Photoresist development with halide chemistries |
Samantha Tan, Jengyi Yu, Da Li, Yiwen FAN, Yang Pan +5 more |
2024-10-01 |
$207,578,000 |
| 11942565 |
Solar cell emitter region fabrication using substrate-level ion implantation |
Staffan Westerberg, David D. Smith |
2024-03-26 |
|
| 11921427 |
Methods for making hard masks useful in next-generation lithography |
Katie Lynn Nardi, Chenghao Wu |
2024-03-05 |
$158,619,000 |
| 11437530 |
Metallization of solar cells with differentiated p-type and n-type region architectures |
David D. Smith, Scott Harrington, Venkatasubramani Balu |
2022-09-06 |
$24,357,000 |
| 11316056 |
Solar cell emitter region fabrication using self-aligned implant and cap |
— |
2022-04-26 |
$22,822,000 |
| 10224442 |
Metallization of solar cells with differentiated P-type and N-type region architectures |
David D. Smith, Scott Harrington, Venkatasubramani Balu |
2019-03-05 |
$5,272,000 |
| 9829805 |
Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor |
Timothy Michaelson, Barry Chin, Majeed A. Foad, Paul Deaton |
2017-11-28 |
$20,834,000 |
| 9716205 |
Solar cell emitter region fabrication using ion implantation |
David D. Smith |
2017-07-25 |
$8,085,000 |
| 9632411 |
Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor |
Timothy Michaelson, Barry Chin, Majeed A. Foad, Paul Deaton |
2017-04-25 |
$22,808,000 |
| 9577134 |
Solar cell emitter region fabrication using self-aligned implant and cap |
— |
2017-02-21 |
$4,588,000 |
| 9577126 |
Solar cell emitter region fabrication using ion implantation |
David D. Smith, Staffan Westerberg |
2017-02-21 |
$4,588,000 |
| 9502601 |
Metallization of solar cells with differentiated P-type and N-type region architectures |
David D. Smith, Scott Harrington, Venkatasubramani Balu |
2016-11-22 |
$4,666,000 |
| 9401450 |
Solar cell emitter region fabrication using ion implantation |
David D. Smith |
2016-07-26 |
$12,712,000 |
| 9263625 |
Solar cell emitter region fabrication using ion implantation |
David D. Smith, Staffan Westerberg |
2016-02-16 |
$5,663,000 |
| 9236467 |
Atomic layer deposition of hafnium or zirconium alloy films |
Timothy Michaelson, Paul F. Ma, Paul Deaton |
2016-01-12 |
$9,921,000 |
| 8821986 |
Activated silicon precursors for low temperature deposition |
Todd Schroeder, David Thompson, Jeffrey W. Anthis |
2014-09-02 |
$23,819,000 |
| 8673679 |
Enhanced vision system for screen printing pattern alignment |
Marco Gallazzo, Andrea Baccini, Sunhom Paak, Hongbin Fang, Zhenhua Zhang |
2014-03-18 |
|
