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Michael P. Stewart, Prabhat Kumar, Lin Zhang, Hari Ponnekanti |
2014-10-14 |
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Hybrid heterojunction solar cell fabrication using a doping layer mask |
Timothy Weidman, Rohit Mishra, Michael P. Stewart, Yonghwa Chris Cha, Hongbin Fang |
2012-11-13 |
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Electrophoretic solar cell metallization process and apparatus |
Manoocher Birang, Alexander Sou-Kang Ko, Eugene Rabinovich |
2012-07-10 |
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Hybrid heterojunction solar cell fabrication using a metal layer mask |
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2012-05-22 |
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Timothy Weidman |
2012-04-10 |
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2012-03-06 |
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2010-01-26 |
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Temperature control in a chemical mechanical polishing system |
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2006-12-26 |
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Method and apparatus for polishing substrates |
Yongsik Moon |
2006-07-04 |
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2003-09-16 |
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2003-05-13 |
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Method and apparatus for enhanced CMP using metals having reductive properties |
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2003-03-25 |
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Carrier head with local pressure control for a chemical mechanical polishing apparatus |
Steven M. Zuniga, Hung Chih Chen, Manoocher Birang, Sen-Hou Ko |
2003-01-28 |
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Carrier head with local pressure control for a chemical mechanical polishing apparatus |
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2002-04-09 |
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Endpoint monitoring with polishing rate change |
Stan Tsai, Fred C. Redeker |
2001-10-30 |
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Method of chemical mechanical polishing a metal layer |
Boris Fishkin, Ronald Lin |
2001-04-17 |
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Carrier head with local pressure control for a chemical mechanical polishing apparatus |
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2000-11-14 |
