Issued Patents All Time
Showing 25 most recent of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136574 | Technique for training neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Kiran Shrestha, David Maxwell Gage, Benjamin Cherian, Jun Qian +1 more | 2024-11-05 |
| 12057354 | Trained neural network in in-situ monitoring during polishing and polishing system | Kun Xu, Kiran Shrestha, David Maxwell Gage, Benjamin Cherian, Jun Qian +1 more | 2024-08-06 |
| 11791224 | Technique for training neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Kiran Shrestha, David Maxwell Gage, Benjamin Cherian, Jun Qian +1 more | 2023-10-17 |
| 11658078 | Using a trained neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Kiran Shrestha, David Maxwell Gage, Benjamin Cherian, Jun Qian +1 more | 2023-05-23 |
| 10556315 | Determination of gain for eddy current sensor | Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Wen-Chiang Tu +2 more | 2020-02-11 |
| 10207386 | Determination of gain for eddy current sensor | Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Wen-Chiang Tu +2 more | 2019-02-19 |
| 9636797 | Adjusting eddy current measurements | Kun Xu, Ingemar Carlsson, Boguslaw A. Swedek, Shih-Haur Shen, Hassan G. Iravani +2 more | 2017-05-02 |
| 9281253 | Determination of gain for eddy current sensor | Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Wen-Chiang Tu +2 more | 2016-03-08 |
| 9275917 | Determination of gain for eddy current sensor | Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Wen-Chiang Tu +2 more | 2016-03-01 |
| 9227293 | Multi-platen multi-head polishing architecture | Jeffrey Drue David, Boguslaw A. Swedek, Thomas H. Osterheld, Benjamin Cherian, Dominic J. Benvegnu +3 more | 2016-01-05 |
| 9221147 | Endpointing with selective spectral monitoring | Jun Qian, Sivakumar Dhandapani, Benjamin Cherian, Thomas H. Osterheld, Jeffrey Drue David +2 more | 2015-12-29 |
| 9205527 | In-situ monitoring system with monitoring of elongated region | Kun Xu, Shih-Haur Shen, Tzu-Yu Liu, Ingemar Carlsson, Hassan G. Iravani +2 more | 2015-12-08 |
| 9056383 | Path for probe of spectrographic metrology system | Jeffrey Drue David, Benjamin Cherian, Dominic J. Benvegnu, Boguslaw A. Swedek, Thomas H. Osterheld +4 more | 2015-06-16 |
| 8535121 | Retaining ring and articles for carrier head | Andrew J. Nagengast, Hung Chih Chen | 2013-09-17 |
| 8465342 | Method of making and apparatus having windowless polishing pad and protected fiber | Jimin Zhang, Alain Duboust | 2013-06-18 |
| 8408965 | Eddy current gain compensation | Thomas H. Osterheld | 2013-04-02 |
| 8393940 | Molding windows in thin pads | Boguslaw A. Swedek, Dominic J. Benvegnu | 2013-03-12 |
| 8376813 | Retaining ring and articles for carrier head | Andrew J. Nagengast, Hung Chih Chen | 2013-02-19 |
| 8287330 | Reducing polishing pad deformation | Boguslaw A. Swedek, David J. Lischka | 2012-10-16 |
| 8187977 | Automatic gain control | Boguslaw A. Swedek | 2012-05-29 |
| 8157614 | Method of making and apparatus having windowless polishing pad and protected fiber | Jimin Zhang, Alain Duboust | 2012-04-17 |
| 7621798 | Reducing polishing pad deformation | Boguslaw A. Swedek, David J. Lischka | 2009-11-24 |
| 7494929 | Automatic gain control | Boguslaw A. Swedek | 2009-02-24 |
| 7354334 | Reducing polishing pad deformation | Manoocher Birang, Boguslaw A. Swedek | 2008-04-08 |
| 7255637 | Carrier head vibration damping | Andrew J. Nagengast, Hung Chih Chen | 2007-08-14 |