| 12447578 |
Compensation for substrate doping in edge reconstruction for in-situ electromagnetic inductive monitoring |
Kui Xu, David Maxwell Gage, Harry W. Lee, Jr., Denis Ivanov, Hassan G. Iravani +1 more |
2025-10-21 |
|
| 12136574 |
Technique for training neural network for use in in-situ monitoring during polishing and polishing system |
Kun Xu, Kiran Shrestha, David Maxwell Gage, Benjamin Cherian, Jun Qian +1 more |
2024-11-05 |
$79,202,000 |
| 12057354 |
Trained neural network in in-situ monitoring during polishing and polishing system |
Kun Xu, Kiran Shrestha, David Maxwell Gage, Benjamin Cherian, Jun Qian +1 more |
2024-08-06 |
$90,312,000 |
| 11791224 |
Technique for training neural network for use in in-situ monitoring during polishing and polishing system |
Kun Xu, Kiran Shrestha, David Maxwell Gage, Benjamin Cherian, Jun Qian +1 more |
2023-10-17 |
$42,568,000 |
| 11658078 |
Using a trained neural network for use in in-situ monitoring during polishing and polishing system |
Kun Xu, Kiran Shrestha, David Maxwell Gage, Benjamin Cherian, Jun Qian +1 more |
2023-05-23 |
$53,064,000 |
| 10556315 |
Determination of gain for eddy current sensor |
Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Wen-Chiang Tu +2 more |
2020-02-11 |
$47,813,000 |
| 10207386 |
Determination of gain for eddy current sensor |
Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Wen-Chiang Tu +2 more |
2019-02-19 |
$29,015,000 |
| 9636797 |
Adjusting eddy current measurements |
Kun Xu, Ingemar Carlsson, Boguslaw A. Swedek, Shih-Haur Shen, Hassan G. Iravani +2 more |
2017-05-02 |
$24,975,000 |
| 9281253 |
Determination of gain for eddy current sensor |
Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Wen-Chiang Tu +2 more |
2016-03-08 |
$13,282,000 |
| 9275917 |
Determination of gain for eddy current sensor |
Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Wen-Chiang Tu +2 more |
2016-03-01 |
$12,540,000 |
| 9227293 |
Multi-platen multi-head polishing architecture |
Jeffrey Drue David, Boguslaw A. Swedek, Thomas H. Osterheld, Benjamin Cherian, Dominic J. Benvegnu +3 more |
2016-01-05 |
$12,358,000 |
| 9221147 |
Endpointing with selective spectral monitoring |
Jun Qian, Sivakumar Dhandapani, Benjamin Cherian, Thomas H. Osterheld, Jeffrey Drue David +2 more |
2015-12-29 |
$15,334,000 |
| 9205527 |
In-situ monitoring system with monitoring of elongated region |
Kun Xu, Shih-Haur Shen, Tzu-Yu Liu, Ingemar Carlsson, Hassan G. Iravani +2 more |
2015-12-08 |
$11,073,000 |
| 9056383 |
Path for probe of spectrographic metrology system |
Jeffrey Drue David, Benjamin Cherian, Dominic J. Benvegnu, Boguslaw A. Swedek, Thomas H. Osterheld +4 more |
2015-06-16 |
$20,291,000 |
| 8535121 |
Retaining ring and articles for carrier head |
Andrew J. Nagengast, Hung Chih Chen |
2013-09-17 |
$7,314,000 |
| 8465342 |
Method of making and apparatus having windowless polishing pad and protected fiber |
Jimin Zhang, Alain Duboust |
2013-06-18 |
$9,611,000 |
| 8408965 |
Eddy current gain compensation |
Thomas H. Osterheld |
2013-04-02 |
$12,624,000 |
| 8393940 |
Molding windows in thin pads |
Boguslaw A. Swedek, Dominic J. Benvegnu |
2013-03-12 |
$21,745,000 |
| 8376813 |
Retaining ring and articles for carrier head |
Andrew J. Nagengast, Hung Chih Chen |
2013-02-19 |
$12,220,000 |
| 8287330 |
Reducing polishing pad deformation |
Boguslaw A. Swedek, David J. Lischka |
2012-10-16 |
$10,138,000 |
| 8187977 |
Automatic gain control |
Boguslaw A. Swedek |
2012-05-29 |
$9,160,000 |
| 8157614 |
Method of making and apparatus having windowless polishing pad and protected fiber |
Jimin Zhang, Alain Duboust |
2012-04-17 |
$9,496,000 |
| 7621798 |
Reducing polishing pad deformation |
Boguslaw A. Swedek, David J. Lischka |
2009-11-24 |
$46,598,000 |
| 7494929 |
Automatic gain control |
Boguslaw A. Swedek |
2009-02-24 |
$21,837,000 |
| 7354334 |
Reducing polishing pad deformation |
Manoocher Birang, Boguslaw A. Swedek |
2008-04-08 |
$17,034,000 |
