Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Using a trained neural network for use in in-situ monitoring during polishing and polishing system

Using a trained neural network for use in in-situ monitoring during polishing and polishing system

US Patent 11658078 · Granted May 23, 2023

Estimated economic value: $53,064,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Control substrate polishing using constrained cost function2025
In-situ monitoring to label training spectra for machine learning system for spe2025
Determining substrate orientation with acoustic signals2025
Polishing apparatus using neural network for monitoring2025
Compensation for substrate doping in edge reconstruction for in-situ electromagn2025
Compensation for substrate doping in edge reconstruction for in-situ electromagn2025
Compensation for substrate doping in edge reconstruction for in-situ electromagn2025
Pressure signals with different frequencies during friction monitoring to provid2025
Control of processing parameters during substrate polishing using cost function2025
Determining substrate precession with acoustic signals2025
Determining substrate precession with acoustic signals2025
Eddy current monitoring to detect vibration in polishing2025