| 12136574 |
Technique for training neural network for use in in-situ monitoring during polishing and polishing system |
Kun Xu, Kiran Shrestha, Doyle E. Bennett, Benjamin Cherian, Jun Qian +1 more |
2024-11-05 |
| 12057354 |
Trained neural network in in-situ monitoring during polishing and polishing system |
Kun Xu, Kiran Shrestha, Doyle E. Bennett, Benjamin Cherian, Jun Qian +1 more |
2024-08-06 |
| 11948885 |
Methods and apparatus for forming dual metal interconnects |
Suketu Arun Parikh, Rong Tao, Roey Shaviv, Joung Joo Lee, Seshadri Ganguli +3 more |
2024-04-02 |
| 11865664 |
Profile control with multiple instances of contol algorithm during polishing |
Kun Xu, Harry Q. Lee, Benjamin Cherian |
2024-01-09 |
| 11850699 |
Switching control algorithms on detection of exposure of underlying layer during polishing |
Kun Xu, Harry Q. Lee, Benjamin Cherian |
2023-12-26 |
| 11787008 |
Chemical mechanical polishing with applied magnetic field |
Xingfeng Wang, Jianshe Tang, Feng Q. Liu, Stephen Jew |
2023-10-17 |
| 11791224 |
Technique for training neural network for use in in-situ monitoring during polishing and polishing system |
Kun Xu, Kiran Shrestha, Doyle E. Bennett, Benjamin Cherian, Jun Qian +1 more |
2023-10-17 |
| 11780045 |
Compensation for substrate doping for in-situ electromagnetic inductive monitoring |
Wei Lu, Harry Q. Lee, Kun Xu, Jimin Zhang |
2023-10-10 |
| 11658078 |
Using a trained neural network for use in in-situ monitoring during polishing and polishing system |
Kun Xu, Kiran Shrestha, Doyle E. Bennett, Benjamin Cherian, Jun Qian +1 more |
2023-05-23 |
| 11075165 |
Methods and apparatus for forming dual metal interconnects |
Suketu Arun Parikh, Rong Tao, Roey Shaviv, Joung Joo Lee, Seshadri Ganguli +3 more |
2021-07-27 |
| 10350723 |
Overpolishing based on electromagnetic inductive monitoring of trench depth |
Shih-Haur Shen, Jianshe Tang, Jimin Zhang |
2019-07-16 |
| 9073169 |
Feedback control of polishing using optical detection of clearance |
Kun Xu, Ingemar Carlsson, Feng Q. Liu, You Wang, Dominic J. Benvegnu +5 more |
2015-07-07 |
