Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136574 | Technique for training neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Kiran Shrestha, Doyle E. Bennett, Benjamin Cherian, Jun Qian +1 more | 2024-11-05 |
| 12057354 | Trained neural network in in-situ monitoring during polishing and polishing system | Kun Xu, Kiran Shrestha, Doyle E. Bennett, Benjamin Cherian, Jun Qian +1 more | 2024-08-06 |
| 11948885 | Methods and apparatus for forming dual metal interconnects | Suketu Arun Parikh, Rong Tao, Roey Shaviv, Joung Joo Lee, Seshadri Ganguli +3 more | 2024-04-02 |
| 11865664 | Profile control with multiple instances of contol algorithm during polishing | Kun Xu, Harry Q. Lee, Benjamin Cherian | 2024-01-09 |
| 11850699 | Switching control algorithms on detection of exposure of underlying layer during polishing | Kun Xu, Harry Q. Lee, Benjamin Cherian | 2023-12-26 |
| 11787008 | Chemical mechanical polishing with applied magnetic field | Xingfeng Wang, Jianshe Tang, Feng Q. Liu, Stephen Jew | 2023-10-17 |
| 11791224 | Technique for training neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Kiran Shrestha, Doyle E. Bennett, Benjamin Cherian, Jun Qian +1 more | 2023-10-17 |
| 11780045 | Compensation for substrate doping for in-situ electromagnetic inductive monitoring | Wei Lu, Harry Q. Lee, Kun Xu, Jimin Zhang | 2023-10-10 |
| 11658078 | Using a trained neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Kiran Shrestha, Doyle E. Bennett, Benjamin Cherian, Jun Qian +1 more | 2023-05-23 |
| 11075165 | Methods and apparatus for forming dual metal interconnects | Suketu Arun Parikh, Rong Tao, Roey Shaviv, Joung Joo Lee, Seshadri Ganguli +3 more | 2021-07-27 |
| 10350723 | Overpolishing based on electromagnetic inductive monitoring of trench depth | Shih-Haur Shen, Jianshe Tang, Jimin Zhang | 2019-07-16 |
| 9073169 | Feedback control of polishing using optical detection of clearance | Kun Xu, Ingemar Carlsson, Feng Q. Liu, You Wang, Dominic J. Benvegnu +5 more | 2015-07-07 |