Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12370646 | Polishing apparatus using machine learning and compensation for pad thickness | Kun Xu, Harry Q. Lee, Jun Qian | 2025-07-29 |
| 12103135 | Core configuration for in-situ electromagnetic induction monitoring system | Hassan G. Iravani, Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek | 2024-10-01 |
| 11638982 | Core configuration for in-situ electromagnetic induction monitoring system | Hassan G. Iravani, Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek | 2023-05-02 |
| 11524382 | Polishing apparatus using machine learning and compensation for pad thickness | Kun Xu, Harry Q. Lee, Jun Qian | 2022-12-13 |
| 11348783 | Methods and apparatus for dynamical control of radial uniformity with two-story microwave cavities | Satoru Kobayashi, Hideo Sugai, Lance A. Scudder, Dmitry Lubomirsky | 2022-05-31 |
| 10994389 | Polishing apparatus using neural network for monitoring | Kun Xu, Hassan G. Iravani, Boguslaw A. Swedek, Shih-Haur Shen, Harry Q. Lee +1 more | 2021-05-04 |
| 10391610 | Core configuration for in-situ electromagnetic induction monitoring system | Hassan G. Iravani, Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek | 2019-08-27 |