Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12320883 | Resistivity-based adjustment of thresholds for in-situ monitoring | Kun Xu, Ingemar Carlsson, Boguslaw A. Swedek, Tzu-Yu Liu | 2025-06-03 |
| 12214468 | Temperature control of chemical mechanical polishing | Haosheng Wu, Hari Soundararajan, Yen-Chu Yang, Jianshe Tang, Shou-Sung Chang +1 more | 2025-02-04 |
| 12103135 | Core configuration for in-situ electromagnetic induction monitoring system | Hassan G. Iravani, Kun Xu, Denis Ivanov, Boguslaw A. Swedek | 2024-10-01 |
| 11826872 | Temperature and slurry flow rate control in CMP | Haosheng Wu, Jianshe Tang, Brian J. Brown, Shou-Sung Chang, Hari Soundararajan | 2023-11-28 |
| 11638982 | Core configuration for in-situ electromagnetic induction monitoring system | Hassan G. Iravani, Kun Xu, Denis Ivanov, Boguslaw A. Swedek | 2023-05-02 |
| 11199605 | Resistivity-based adjustment of measurements from in-situ monitoring | Kun Xu, Ingemar Carlsson, Boguslaw A. Swedek, Tzu-Yu Liu | 2021-12-14 |
| 11079459 | Resistivity-based calibration of in-situ electromagnetic inductive monitoring | Kun Xu, Ingemar Carlsson, Boguslaw A. Swedek, Tzu-Yu Liu | 2021-08-03 |
| 11004708 | Core configuration with alternating posts for in-situ electromagnetic induction monitoring system | Hassan G. Iravani, Boguslaw A. Swedek, Tzu-Yu Liu, Kun Xu | 2021-05-11 |
| 10994389 | Polishing apparatus using neural network for monitoring | Kun Xu, Hassan G. Iravani, Denis Ivanov, Boguslaw A. Swedek, Harry Q. Lee +1 more | 2021-05-04 |
| 10589397 | Endpoint control of multiple substrate zones of varying thickness in chemical mechanical polishing | Alain Duboust, Wen-Chiang Tu, Jimin Zhang, Ingemar Carlsson, Boguslaw A. Swedek +4 more | 2020-03-17 |
| 10562148 | Real time profile control for chemical mechanical polishing | Kun Xu, Tzu-Yu Liu | 2020-02-18 |
| 10556315 | Determination of gain for eddy current sensor | Kun Xu, Boguslaw A. Swedek, Ingemar Carlsson, Doyle E. Bennett, Wen-Chiang Tu +2 more | 2020-02-11 |
| 10427272 | Endpoint detection with compensation for filtering | Kun Xu, Kevin Y. Lin, Ingemar Carlsson, Tzu-Yu Liu | 2019-10-01 |
| 10391610 | Core configuration for in-situ electromagnetic induction monitoring system | Hassan G. Iravani, Kun Xu, Denis Ivanov, Boguslaw A. Swedek | 2019-08-27 |
| 10350723 | Overpolishing based on electromagnetic inductive monitoring of trench depth | Jianshe Tang, Jimin Zhang, David Maxwell Gage | 2019-07-16 |
| 10207386 | Determination of gain for eddy current sensor | Kun Xu, Boguslaw A. Swedek, Ingemar Carlsson, Doyle E. Bennett, Wen-Chiang Tu +2 more | 2019-02-19 |
| 9636797 | Adjusting eddy current measurements | Kun Xu, Ingemar Carlsson, Boguslaw A. Swedek, Doyle E. Bennett, Hassan G. Iravani +2 more | 2017-05-02 |
| 9472475 | Feedback control using detection of clearance and adjustment for uniform topography | Kun Xu, Ingemar Carlsson, Tzu-Yu Liu, Boguslaw A. Swedek, Wen-Chiang Tu +1 more | 2016-10-18 |
| 9281253 | Determination of gain for eddy current sensor | Kun Xu, Boguslaw A. Swedek, Ingemar Carlsson, Doyle E. Bennett, Wen-Chiang Tu +2 more | 2016-03-08 |
| 9275917 | Determination of gain for eddy current sensor | Kun Xu, Boguslaw A. Swedek, Ingemar Carlsson, Doyle E. Bennett, Wen-Chiang Tu +2 more | 2016-03-01 |
| 9205527 | In-situ monitoring system with monitoring of elongated region | Kun Xu, Tzu-Yu Liu, Ingemar Carlsson, Hassan G. Iravani, Boguslaw A. Swedek +2 more | 2015-12-08 |
| 9023667 | High sensitivity eddy current monitoring system | Hassan G. Iravani, Kun Xu, Boguslaw A. Swedek, Ingemar Carlsson, Wen-Chiang Tu | 2015-05-05 |
| 9005999 | Temperature control of chemical mechanical polishing | Kun Xu, Jimin Zhang, David H. Mai, Stephen Jew, Zhihong Wang +4 more | 2015-04-14 |
| 8694144 | Endpoint control of multiple substrates of varying thickness on the same platen in chemical mechanical polishing | Alain Duboust, Stephen Jew, David H. Mai, Huyen Tran, Wen-Chiang Tu +4 more | 2014-04-08 |