Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392427 | Insulated fluid lines in chemical mechanical polishing | Chad Pollard, Paul D. Butterfield, Shou-Sung Chang, Haosheng Wu, Calvin Spencer Lee +1 more | 2025-08-19 |
| 12318882 | Apparatus and method for CMP temperature control | Shou-Sung Chang, Haosheng Wu, Jianshe Tang | 2025-06-03 |
| 12296427 | Apparatus and method for CMP temperature control | Haosheng Wu, Shou-Sung Chang, Chih Chung Chou, Jianshe Tang, Hui Chen +1 more | 2025-05-13 |
| 12290896 | Apparatus and method for CMP temperature control | Shou-Sung Chang, Haosheng Wu, Jianshe Tang | 2025-05-06 |
| 12214468 | Temperature control of chemical mechanical polishing | Haosheng Wu, Yen-Chu Yang, Jianshe Tang, Shou-Sung Chang, Shih-Haur Shen +1 more | 2025-02-04 |
| 12106976 | Steam-assisted single substrate cleaning process and apparatus | Jianshe Tang, Wei Lu, Haosheng Wu, Taketo Sekine, Shou-Sung Chang +1 more | 2024-10-01 |
| 12030093 | Steam treatment stations for chemical mechanical polishing system | Haosheng Wu, Jianshe Tang, Shou-Sung Chang, Hui Chen, Chih Chung Chou +2 more | 2024-07-09 |
| 11919123 | Apparatus and method for CMP temperature control | Surajit Kumar, Hui Chen, Shou-Sung Chang | 2024-03-05 |
| 11897079 | Low-temperature metal CMP for minimizing dishing and corrosion, and improving pad asperity | Haosheng Wu, Jianshe Tang, Shou-Sung Chang, Brian J. Brown, Yen-Chu Yang +2 more | 2024-02-13 |
| 11865671 | Temperature-based in-situ edge assymetry correction during CMP | Haosheng Wu, Shou-Sung Chang, Jianshe Tang, Chih Chung Chou, Hui Chen +1 more | 2024-01-09 |
| 11833637 | Control of steam generation for chemical mechanical polishing | Shou-Sung Chang, Calvin Spencer Lee, Jonathan P. Domin, Shuchivrat Datar, Dmitry Sklyar +3 more | 2023-12-05 |
| 11826872 | Temperature and slurry flow rate control in CMP | Haosheng Wu, Jianshe Tang, Brian J. Brown, Shih-Haur Shen, Shou-Sung Chang | 2023-11-28 |
| 11752589 | Chemical mechanical polishing temperature scanning apparatus for temperature control | Shou-Sung Chang, Haosheng Wu, Jianshe Tang | 2023-09-12 |
| 11728185 | Steam-assisted single substrate cleaning process and apparatus | Jianshe Tang, Wei Lu, Haosheng Wu, Taketo Sekine, Shou-Sung Chang +1 more | 2023-08-15 |
| 11697187 | Temperature-based assymetry correction during CMP and nozzle for media dispensing | Haosheng Wu, Shou-Sung Chang, Jianshe Tang, Chih Chung, Hui Chen +1 more | 2023-07-11 |
| 11633833 | Use of steam for pre-heating of CMP components | Haosheng Wu, Jianshe Tang, Shou-Sung Chang, Paul D. Butterfield, Hui Chen +2 more | 2023-04-25 |
| 11628478 | Steam cleaning of CMP components | Haosheng Wu, Jianshe Tang, Shou-Sung Chang, Hui Chen, Chih Chung Chou +2 more | 2023-04-18 |
| 11597052 | Temperature control of chemical mechanical polishing | Shou-Sung Chang, Haosheng Wu, Jianshe Tang, Jeonghoon Oh, Rajeev Bajaj +1 more | 2023-03-07 |
| 11446711 | Steam treatment stations for chemical mechanical polishing system | Haosheng Wu, Jianshe Tang, Shou-Sung Chang, Hui Chen, Chih Chung Chou +2 more | 2022-09-20 |