Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11833637 | Control of steam generation for chemical mechanical polishing | Hari Soundararajan, Shou-Sung Chang, Calvin Spencer Lee, Jonathan P. Domin, Dmitry Sklyar +3 more | 2023-12-05 |
| 10256111 | Chemical mechanical polishing automated recipe generation | Eric Lau, King Yi Heung, Charles C. Garretson, Jun Qian, Thomas H. Osterheld +1 more | 2019-04-09 |