Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11833637 | Control of steam generation for chemical mechanical polishing | Hari Soundararajan, Shou-Sung Chang, Calvin Spencer Lee, Shuchivrat Datar, Dmitry Sklyar +3 more | 2023-12-05 |
| 11717936 | Methods for a web-based CMP system | Dmitry Sklyar, Jeonghoon Oh, Gerald Alonzo, Steven M. Zuniga, Jay Gurusamy | 2023-08-08 |
| 11721563 | Non-contact clean module | Jagan Rangarajan, Adrian Blank, Edward Golubovsky, Balasubramaniam Coimbatore Jaganathan, Steven M. Zuniga +2 more | 2023-08-08 |
| 11289347 | Non-contact clean module | Jagan Rangarajan, Adrian Blank, Edward Golubovsky, Balasubramaniam Coimbatore Jaganathan, Steven M. Zuniga +2 more | 2022-03-29 |
| 9013176 | Methods and apparatus for sensing a substrate in a load cup | David J. Lischka, Jim K. Atkinson, Andrew Q. Liu | 2015-04-21 |
| 8250695 | Roller assembly for a brush cleaning device in a cleaning module | Lakshmanan Karuppiah, Dan Zhang, Simon Yavelberg, Jim K. Atkinson, Hung Chih Chen +1 more | 2012-08-28 |