Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11710648 | Drying environments for reducing substrate defects | Edwin Velazquez | 2023-07-25 |
| 11430672 | Drying environments for reducing substrate defects | Edwin Velazquez | 2022-08-30 |
| 10256120 | Systems, methods and apparatus for post-chemical mechanical planarization substrate buff pre-cleaning | Clinton SAKATA, Hui Chen, Brian J. Brown, Jianshe Tang, Yufei Chen +1 more | 2019-04-09 |
| 10229842 | Double sided buff module for post CMP cleaning | Clinton SAKATA, Hui Chen, Tomohiko Kitajima, Brian J. Brown | 2019-03-12 |
| 9636714 | Compression molded articles employing circumferential surfaces having friction-enhancing patterns to contact substrates during wet chemical processes | David Alvarez | 2017-05-02 |
| 9352471 | Substrate gripper apparatus and methods | Edwin Velazquez, Gee Sun Hoey | 2016-05-31 |
| 9119461 | High stiffness, anti-slip scrubber brush assembly, high-stiffness mandrel, subassemblies, and assembly methods | Hui Chen, Hung Chih Chen, David Datong Huo | 2015-09-01 |
| 9013176 | Methods and apparatus for sensing a substrate in a load cup | David J. Lischka, Jonathan P. Domin, Andrew Q. Liu | 2015-04-21 |
| 8968055 | Methods and apparatus for pre-chemical mechanical planarization buffing module | Hui Chen, Allen L. D'Ambra, Hung Chih Chen | 2015-03-03 |
| 8869422 | Methods and apparatus for marangoni substrate drying using a vapor knife manifold | Edwin Velazquez, Allen L. D'Ambra | 2014-10-28 |
| 8250695 | Roller assembly for a brush cleaning device in a cleaning module | Lakshmanan Karuppiah, Dan Zhang, Simon Yavelberg, Hung Chih Chen, Noel Manto +1 more | 2012-08-28 |