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Drying environments for reducing substrate defects |
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Drying environments for reducing substrate defects |
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Systems, methods and apparatus for post-chemical mechanical planarization substrate buff pre-cleaning |
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Double sided buff module for post CMP cleaning |
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Compression molded articles employing circumferential surfaces having friction-enhancing patterns to contact substrates during wet chemical processes |
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2017-05-02 |
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Substrate gripper apparatus and methods |
Edwin Velazquez, Gee Sun Hoey |
2016-05-31 |
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High stiffness, anti-slip scrubber brush assembly, high-stiffness mandrel, subassemblies, and assembly methods |
Hui Chen, Hung Chih Chen, David Datong Huo |
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Methods and apparatus for sensing a substrate in a load cup |
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Methods and apparatus for pre-chemical mechanical planarization buffing module |
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Edwin Velazquez, Allen L. D'Ambra |
2014-10-28 |
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Roller assembly for a brush cleaning device in a cleaning module |
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