Issued Patents All Time
Showing 25 most recent of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12330260 | Polishing pad with secondary window seal | Rajkumar Alagarsamy, Yongqi Hu, Periya Gopalan, Christopher R. Mahon | 2025-06-17 |
| 12048981 | Retaining ring having inner surfaces with features | Steven Mark Reedy, Jeonghoon Oh, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu +1 more | 2024-07-30 |
| 11618124 | Polishing pad with secondary window seal | Rajkumar Alagarsamy, Yongqi Hu, Periya Gopalan, Christopher R. Mahon | 2023-04-04 |
| 11453099 | Retaining ring having inner surfaces with features | Steven Mark Reedy, Jeonghoon Oh, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu +1 more | 2022-09-27 |
| 11446740 | Multiple sequential linear powder dispensers for additive manufacturing | Christopher A. Rowland, Anantha K. Subramani, Kasiraman Krishnan, Kartik Ramaswamy, Thomas Brezoczky +5 more | 2022-09-20 |
| 11417561 | Edge ring for a substrate processing chamber | Govinda Raj, Kadthala Ramaya Narendrnath, Bopanna Ichettira VASANTHA | 2022-08-16 |
| 10946496 | Chemical mechanical polishing retaining ring with integrated sensor | — | 2021-03-16 |
| 10744618 | Polishing pad with secondary window seal | Rajkumar Alagarsamy, Yongqi Hu, Periya Gopalan, Christopher R. Mahon | 2020-08-18 |
| 10656100 | Surface acoustic wave sensors in semiconductor processing equipment | Ramesh Gopalan, Zubin Huang | 2020-05-19 |
| 10553473 | Edge ring for a substrate processing chamber | Govinda Raj, Kadthala Ramaya Narendrnath, Bopanna Ichettira VASANTHA | 2020-02-04 |
| 10513008 | Chemical mechanical polishing smart ring | Zubin Huang, Stephen A. Wells, Ramesh Gopalan, Gangadhar Sheelavant | 2019-12-24 |
| 10500695 | Retaining ring having inner surfaces with features | Steven Mark Reedy, Jeonghoon Oh, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu +1 more | 2019-12-10 |
| 10399202 | Retaining ring for lower wafer defects | Yongqi Hu, Gangadhar Sheelavant, Kadthala Ramaya Narendrnath | 2019-09-03 |
| 10290459 | Magnetron having enhanced cooling characteristics | Govinda Raj, Ramprakash Sankarakrishnan | 2019-05-14 |
| 10141153 | Magnetron having enhanced cooling characteristics | Govinda Raj, Ramprakash Sankarakrishnan | 2018-11-27 |
| 10094788 | Surface acoustic wave sensors in semiconductor processing equipment | Ramesh Gopalan, Zubin Huang | 2018-10-09 |
| 10029346 | External clamp ring for a chemical mechanical polishing carrier head | Patrick Ala, Bo Ding, Yongqi Hu, Mats Larsson | 2018-07-24 |
| 9878421 | Chemical mechanical polishing retaining ring with integrated sensor | — | 2018-01-30 |
| 9744640 | Corrosion resistant retaining rings | Gangadhar Sheelavant, Yongqi Hu | 2017-08-29 |
| 9731397 | Polishing pad with secondary window seal | Rajkumar Alagarsamy, Yongqi Hu, Periya Gopalan, Christopher R. Mahon | 2017-08-15 |
| 9731399 | Coated retaining ring | Daniel L. Martin, Jeonghoon Oh | 2017-08-15 |
| 9403256 | Recording measurements by sensors for a carrier head | — | 2016-08-02 |
| 9384122 | High sampling rate sensor buffering in semiconductor processing systems | — | 2016-07-05 |
| 9339914 | Substrate polishing and fluid recycling system | — | 2016-05-17 |
| 8961266 | Polishing pad with secondary window seal | Rajkumar Alagarsamy, Yongqi Hu, Periya Gopalan, Christopher R. Mahon | 2015-02-24 |