| 12434348 |
Retaining ring having inner surfaces with features |
Steven Mark Reedy, Jeong-Il Oh, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu +1 more |
2025-10-07 |
|
| 12330260 |
Polishing pad with secondary window seal |
Rajkumar Alagarsamy, Yongqi Hu, Periya Gopalan, Christopher R. Mahon |
2025-06-17 |
|
| 12048981 |
Retaining ring having inner surfaces with features |
Steven Mark Reedy, Jeonghoon Oh, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu +1 more |
2024-07-30 |
$79,851,000 |
| 11618124 |
Polishing pad with secondary window seal |
Rajkumar Alagarsamy, Yongqi Hu, Periya Gopalan, Christopher R. Mahon |
2023-04-04 |
$41,324,000 |
| 11453099 |
Retaining ring having inner surfaces with features |
Steven Mark Reedy, Jeonghoon Oh, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu +1 more |
2022-09-27 |
$38,581,000 |
| 11446740 |
Multiple sequential linear powder dispensers for additive manufacturing |
Christopher A. Rowland, Anantha K. Subramani, Kasiraman Krishnan, Kartik Ramaswamy, Thomas Brezoczky +5 more |
2022-09-20 |
$25,949,000 |
| 11417561 |
Edge ring for a substrate processing chamber |
Govinda Raj, Kadthala Ramaya Narendrnath, Bopanna Ichettira VASANTHA |
2022-08-16 |
$38,686,000 |
| 10946496 |
Chemical mechanical polishing retaining ring with integrated sensor |
— |
2021-03-16 |
$56,717,000 |
| 10744618 |
Polishing pad with secondary window seal |
Rajkumar Alagarsamy, Yongqi Hu, Periya Gopalan, Christopher R. Mahon |
2020-08-18 |
$40,862,000 |
| 10656100 |
Surface acoustic wave sensors in semiconductor processing equipment |
Ramesh Gopalan, Zubin Huang |
2020-05-19 |
$40,373,000 |
| 10553473 |
Edge ring for a substrate processing chamber |
Govinda Raj, Kadthala Ramaya Narendrnath, Bopanna Ichettira VASANTHA |
2020-02-04 |
$27,329,000 |
| 10513008 |
Chemical mechanical polishing smart ring |
Zubin Huang, Stephen A. Wells, Ramesh Gopalan, Gangadhar Sheelavant |
2019-12-24 |
$58,132,000 |
| 10500695 |
Retaining ring having inner surfaces with features |
Steven Mark Reedy, Jeonghoon Oh, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu +1 more |
2019-12-10 |
$14,920,000 |
| 10399202 |
Retaining ring for lower wafer defects |
Yongqi Hu, Gangadhar Sheelavant, Kadthala Ramaya Narendrnath |
2019-09-03 |
$20,988,000 |
| 10290459 |
Magnetron having enhanced cooling characteristics |
Govinda Raj, Ramprakash Sankarakrishnan |
2019-05-14 |
$40,982,000 |
| 10141153 |
Magnetron having enhanced cooling characteristics |
Govinda Raj, Ramprakash Sankarakrishnan |
2018-11-27 |
$52,277,000 |
| 10094788 |
Surface acoustic wave sensors in semiconductor processing equipment |
Ramesh Gopalan, Zubin Huang |
2018-10-09 |
$16,738,000 |
| 10029346 |
External clamp ring for a chemical mechanical polishing carrier head |
Patrick Ala, Bo Ding, Yongqi Hu, Mats Larsson |
2018-07-24 |
$37,876,000 |
| 9878421 |
Chemical mechanical polishing retaining ring with integrated sensor |
— |
2018-01-30 |
$26,789,000 |
| 9744640 |
Corrosion resistant retaining rings |
Gangadhar Sheelavant, Yongqi Hu |
2017-08-29 |
$19,098,000 |
| 9731397 |
Polishing pad with secondary window seal |
Rajkumar Alagarsamy, Yongqi Hu, Periya Gopalan, Christopher R. Mahon |
2017-08-15 |
$27,403,000 |
| 9731399 |
Coated retaining ring |
Daniel L. Martin, Jeonghoon Oh |
2017-08-15 |
$27,403,000 |
| 9403256 |
Recording measurements by sensors for a carrier head |
— |
2016-08-02 |
$10,698,000 |
| 9384122 |
High sampling rate sensor buffering in semiconductor processing systems |
— |
2016-07-05 |
$10,411,000 |
| 9339914 |
Substrate polishing and fluid recycling system |
— |
2016-05-17 |
$7,135,000 |
