Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Surface acoustic wave sensors in semiconductor processing equipment

Surface acoustic wave sensors in semiconductor processing equipment

US Patent 10656100 · Granted May 19, 2020

Estimated economic value: $40,373,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Retaining ring having inner surfaces with features2025
Systems and methods for substrate support temperature control2025
Remote capacitively coupled plasma deposition of amorphous silicon2025
Polishing pad with secondary window seal2025
Bottom cover plate to reduce wafer planar nonuniformity2025
Substrate support for a substrate processing chamber2025
Methods to eliminate of deposition on wafer bevel and backside2025
Boron concentration tunability in boron-silicon films2025
Systems and methods for substrate support temperature control2024
Retaining ring having inner surfaces with features2024
Wireless in-situ real-time measurement of electrostatic chucking force in semico2024
Systems and methods for substrate support temperature control2024