Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8250695 | Roller assembly for a brush cleaning device in a cleaning module | Lakshmanan Karuppiah, Dan Zhang, Jim K. Atkinson, Hung Chih Chen, Noel Manto +1 more | 2012-08-28 |
| 7407433 | Pad characterization tool | Rashid Mavliev, Gerald Alonzo | 2008-08-05 |
| 7241203 | Six headed carousel | Hung Chih Chen | 2007-07-10 |
| 7044832 | Load cup for chemical mechanical polishing | Alpay Yilmaz, Toshikazu Tomita, Hui Chen, Noel Manto, David J. Lischka +1 more | 2006-05-16 |
| 6369493 | Microwave plasma applicator having a thermal transfer medium between a plasma containing tube and a cooling jacket | Dmitry Lubomirsky, Harald Herchen, David Palagashvili, Donald Olgado | 2002-04-09 |
| 6367410 | Closed-loop dome thermal control apparatus for a semiconductor wafer processing system | Patrick Leahey, Jerry Chen, Richard E. Remington, Timothy D. Driscoll, Robert E. Ryan +3 more | 2002-04-09 |
| 6326597 | Temperature control system for process chamber | Dmitry Lubomirsky, Allen D'Ambra, Edward Floyd, Qiwei Liang, Daniel J. Hoffman +2 more | 2001-12-04 |
| 5775379 | Insulation jacket for fluid carrying conduits | William L. Manofsky, Jr. | 1998-07-07 |
| 5767781 | Method for detection of failed heater in a daisy chain connection | — | 1998-06-16 |
| 5716877 | Process gas delivery system | — | 1998-02-10 |
| 5641359 | Process gas delivery system | — | 1997-06-24 |