Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6367410 | Closed-loop dome thermal control apparatus for a semiconductor wafer processing system | Patrick Leahey, Jerry Chen, Simon Yavelberg, Timothy D. Driscoll, Robert E. Ryan +3 more | 2002-04-09 |
| 6178920 | Plasma reactor with internal inductive antenna capable of generating helicon wave | Yan Ye, Allan D'Ambra, Yeuk-Fai Edwin Mok, James E. Sammons, III | 2001-01-30 |