| 10752987 |
System architecture for combined static and pass-by processing |
Eric C. Lawson, Charles Liu, Terry Bluck, Kevin Fairbairn, Robert Ruck +1 more |
2020-08-25 |
| 9914994 |
System architecture for combined static and pass-by processing |
Eric C. Lawson, Charles Liu, Terry Bluck, Kevin Fairbairn, Robert Ruck +1 more |
2018-03-13 |
| 6598615 |
Compact independent pressure control and vacuum isolation for a turbomolecular pumped plasma reaction chamber |
John Holland, Michael Barnes, Steve S. Y. Mak, Jonathan D. Mohn |
2003-07-29 |
| 6447636 |
Plasma reactor with dynamic RF inductive and capacitive coupling control |
Xue-Yu Qian, Zhi-Wen Sun, Maocheng Li, John Holland, Arthur H. Sato +2 more |
2002-09-10 |
| 6379575 |
Treatment of etching chambers using activated cleaning gas |
Gerald Yin, Xue-Yu Qian, Jonathan D. Mohn, Waiching Chow, Arthur Y. Chen +2 more |
2002-04-30 |
| 6367410 |
Closed-loop dome thermal control apparatus for a semiconductor wafer processing system |
Jerry Chen, Richard E. Remington, Simon Yavelberg, Timothy D. Driscoll, Robert E. Ryan +3 more |
2002-04-09 |
