Closed-loop dome thermal control apparatus for a semiconductor wafer processing system

Assignee

• Applied Materials

Inventors

• Patrick Leahey (6 patents)
• Jerry Chen (34 patents)
• Richard E. Remington (2 patents)
• Simon Yavelberg (37 patents)
• Timothy D. Driscoll (6 patents)
• Robert E. Ryan (23 patents)
• Brian K. Hatcher (12 patents)
• Rolf Guenther (21 patents)
• Xueyu Qian (9 patents)

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