Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8267386 | Pneumatically actuated area vacuum gripper | Walter Schaaf, Thomas Eisele, Tobias Stahl | 2012-09-18 |
| 8065789 | Method of fabricating a heated substrate support | Curtis B. Hammill | 2011-11-29 |
| 7674338 | Heated substrate support and method of fabricating same | Curtis B. Hammill | 2010-03-09 |
| 7354501 | Upper chamber for high density plasma CVD | Sudhir Gondhalekar, Tom K. Cho, Steve Kim, Mehrdad Moshfegh, Shigeru Takehiro +2 more | 2008-04-08 |
| 7345759 | Method and device for the measurement of chemical and/or biological samples | Leif Brand, Christian Eggeling, Karsten Gall, Claus Seidel | 2008-03-18 |
| 7294208 | Apparatus for providing gas to a processing chamber | — | 2007-11-13 |
| 7202953 | Scanning microscopic method having high axial resolution | Juergen Mueller, Karsten Henco, Rodney Fredrick Turner, Peter Axhausen | 2007-04-10 |
| 7074298 | High density plasma CVD chamber | Sudhir Gondhalekar, Tom K. Cho, Shigeru Takehiro, Masayoshi Nohira, Tetsuya Ishikawa +1 more | 2006-07-11 |
| 6915592 | Method and apparatus for generating gas to a processing chamber | — | 2005-07-12 |
| 6916147 | Substrate storage cassette with substrate alignment feature | Dongchoon Suh, Wendell T. Blonigan | 2005-07-12 |
| 6902947 | Integrated method for release and passivation of MEMS structures | Jeffrey D. Chinn, Michael Rattner, James A. Cooper, Toi Yue Becky Leung, Claes Bjorkman | 2005-06-07 |
| 6900133 | Method of etching variable depth features in a crystalline substrate | Jeffrey D. Chinn, Michael Rattner, James A. Cooper | 2005-05-31 |
| 6830950 | Integrated method for release and passivation of MEMS structures | Jeffrey D. Chinn, Michael Rattner, James A. Cooper, Toi Yue Becky Leung | 2004-12-14 |
| 6822185 | Temperature controlled dome-coil system for high power inductively coupled plasma systems | Michael Welch, Paul Luscher, Siamak Salimian, Zhong Qiang Hua, Son M. Phi +1 more | 2004-11-23 |
| 6367410 | Closed-loop dome thermal control apparatus for a semiconductor wafer processing system | Patrick Leahey, Jerry Chen, Richard E. Remington, Simon Yavelberg, Timothy D. Driscoll +3 more | 2002-04-09 |
| 6213735 | Micromechanical ejection pump for separating small fluid volumes from a flowing sample fluid | Karsten Henco, Steffen Howitz, Thomas Wegener | 2001-04-10 |
| 5978202 | Electrostatic chuck having a thermal transfer regulator pad | Ralph Wadensweiler, Ajay Kumar, Shashank Deshmukh, Weinan Jiang | 1999-11-02 |
| 5893643 | Apparatus for measuring pedestal temperature in a semiconductor wafer processing system | Ajay Kumar, Jeffrey D. Chinn, Shashank Deshmukh, Weinan Jiang, Brian Duda +3 more | 1999-04-13 |
| 5851926 | Method for etching transistor gates using a hardmask | Ajay Kumar, Jeffrey D. Chinn, Shashank Deshmukh, Weinan Jiang, Bruce Minaee +1 more | 1998-12-22 |
| 4701231 | Method of forming a joint between a tubular composite and a metal ring | Stanley Peters, Robert L. Kolek, Jeffrey J. Anderson, Clarence F. Marshall | 1987-10-20 |
| 4228976 | Main connector for an airfoil or wing | Max Eiselbrecher, Helmut Jakob | 1980-10-21 |