| 8267386 |
Pneumatically actuated area vacuum gripper |
Walter Schaaf, Thomas Eisele, Tobias Stahl |
2012-09-18 |
|
| 8065789 |
Method of fabricating a heated substrate support |
Curtis B. Hammill |
2011-11-29 |
$8,648,000 |
| 7674338 |
Heated substrate support and method of fabricating same |
Curtis B. Hammill |
2010-03-09 |
$8,227,000 |
| 7354501 |
Upper chamber for high density plasma CVD |
Sudhir Gondhalekar, Tom K. Cho, Steve Kim, Mehrdad Moshfegh, Shigeru Takehiro +2 more |
2008-04-08 |
$17,034,000 |
| 7345759 |
Method and device for the measurement of chemical and/or biological samples |
Leif Brand, Christian Eggeling, Karsten Gall, Claus Seidel |
2008-03-18 |
|
| 7294208 |
Apparatus for providing gas to a processing chamber |
— |
2007-11-13 |
$11,470,000 |
| 7202953 |
Scanning microscopic method having high axial resolution |
Juergen Mueller, Karsten Henco, Rodney Fredrick Turner, Peter Axhausen |
2007-04-10 |
|
| 7074298 |
High density plasma CVD chamber |
Sudhir Gondhalekar, Tom K. Cho, Shigeru Takehiro, Masayoshi Nohira, Tetsuya Ishikawa +1 more |
2006-07-11 |
$12,872,000 |
| 6915592 |
Method and apparatus for generating gas to a processing chamber |
— |
2005-07-12 |
$29,244,000 |
| 6916147 |
Substrate storage cassette with substrate alignment feature |
Dongchoon Suh, Wendell T. Blonigan |
2005-07-12 |
$29,244,000 |
| 6902947 |
Integrated method for release and passivation of MEMS structures |
Jeffrey D. Chinn, Michael Rattner, James A. Cooper, Toi Yue Becky Leung, Claes Bjorkman |
2005-06-07 |
$26,348,000 |
| 6900133 |
Method of etching variable depth features in a crystalline substrate |
Jeffrey D. Chinn, Michael Rattner, James A. Cooper |
2005-05-31 |
$12,544,000 |
| 6830950 |
Integrated method for release and passivation of MEMS structures |
Jeffrey D. Chinn, Michael Rattner, James A. Cooper, Toi Yue Becky Leung |
2004-12-14 |
$24,616,000 |
| 6822185 |
Temperature controlled dome-coil system for high power inductively coupled plasma systems |
Michael Welch, Paul Luscher, Siamak Salimian, Zhong Qiang Hua, Son M. Phi +1 more |
2004-11-23 |
$17,815,000 |
| 6367410 |
Closed-loop dome thermal control apparatus for a semiconductor wafer processing system |
Patrick Leahey, Jerry Chen, Richard E. Remington, Simon Yavelberg, Timothy D. Driscoll +3 more |
2002-04-09 |
$34,803,000 |
| 6213735 |
Micromechanical ejection pump for separating small fluid volumes from a flowing sample fluid |
Karsten Henco, Steffen Howitz, Thomas Wegener |
2001-04-10 |
|
| 5978202 |
Electrostatic chuck having a thermal transfer regulator pad |
Ralph Wadensweiler, Ajay Kumar, Shashank Deshmukh, Weinan Jiang |
1999-11-02 |
$44,218,000 |
| 5893643 |
Apparatus for measuring pedestal temperature in a semiconductor wafer processing system |
Ajay Kumar, Jeffrey D. Chinn, Shashank Deshmukh, Weinan Jiang, Brian Duda +3 more |
1999-04-13 |
$105,936,000 |
| 5851926 |
Method for etching transistor gates using a hardmask |
Ajay Kumar, Jeffrey D. Chinn, Shashank Deshmukh, Weinan Jiang, Bruce Minaee +1 more |
1998-12-22 |
$39,449,000 |
| 4701231 |
Method of forming a joint between a tubular composite and a metal ring |
Stanley Peters, Robert L. Kolek, Jeffrey J. Anderson, Clarence F. Marshall |
1987-10-20 |
$13,578,000 |
| 4228976 |
Main connector for an airfoil or wing |
Max Eiselbrecher, Helmut Jakob |
1980-10-21 |
|
