Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11915932 | Plasma etching of mask materials | Madhavi R. Chandrachood, Madhava Rao Yalamanchili | 2024-02-27 |
| 7611976 | Gate electrode dopant activation method for semiconductor manufacturing | Yi Ma, Khaled Ahmed, Kevin Cunningham, Robert C. McIntosh, Abhilash J. Mayur +6 more | 2009-11-03 |
| 7078302 | Gate electrode dopant activation method for semiconductor manufacturing including a laser anneal | Yi Ma, Khaled Ahmed, Kevin Cunningham, Robert C. McIntosh, Abhilash J. Mayur +6 more | 2006-07-18 |
| 6902947 | Integrated method for release and passivation of MEMS structures | Jeffrey D. Chinn, Rolf Guenther, Michael Rattner, James A. Cooper, Claes Bjorkman | 2005-06-07 |
| 6830950 | Integrated method for release and passivation of MEMS structures | Jeffrey D. Chinn, Rolf Guenther, Michael Rattner, James A. Cooper | 2004-12-14 |
| 6666979 | Dry etch release of MEMS structures | Jeffrey D. Chinn, Vidyut Gopal, Sofiane Soukane | 2003-12-23 |
| 6576489 | Methods of forming microstructure devices | Jeffrey D. Chinn | 2003-06-10 |