Issued Patents All Time
Showing 25 most recent of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10900123 | Apparatus and method for controlled application of reactive vapors to produce thin films and coatings | Boris Kobrin, Romuald Nowak, Richard Yi | 2021-01-26 |
| 9725805 | Apparatus and method for controlled application of reactive vapors to produce thin films and coatings | Boris Kobrin, Romuald Nowak, Richard Yi | 2017-08-08 |
| 8987029 | Protective thin films for use during fabrication of semiconductors, MEMS, and microstructures | Boris Kobrin, Romuald Nowak | 2015-03-24 |
| 8900695 | Durable conformal wear-resistant carbon-doped metal oxide-comprising coating | Boris Kobrin, Romuald Nowak | 2014-12-02 |
| 8545972 | Controlled vapor deposition of multilayered coatings adhered by an oxide layer | Boris Kobrin, Romuald Nowak, Richard Yi | 2013-10-01 |
| 8323723 | Controlled vapor deposition of biocompatible coatings for medical devices | Michael D. Lowery, Laurent Hoffmann, Boris Kobrin, Romuald Nowak, Richard Yi | 2012-12-04 |
| 8298614 | Method of depositing a multilayer coating with a variety of oxide adhesion layers and organic layers | Boris Kobrin, Romuald Nowak, Richard Yi | 2012-10-30 |
| 8178162 | Controlled deposition of silicon-containing coatings adhered by an oxide layer | Boris Kobrin, Romuald Nowak, Richard Yi | 2012-05-15 |
| 8071160 | Surface coating process | Robert W. Ashurst, Adam Anderson | 2011-12-06 |
| 8067258 | Protective thin films for use during fabrication of semiconductors, MEMS, and microstructures | Boris Kobrin, Romuald Nowak | 2011-11-29 |
| 7955704 | Controlled vapor deposition of biocompatible coatings for medical devices | Michael D. Lowery, Laurent Hoffmann, Boris Kobrin, Romuald Nowak, Richard Yi | 2011-06-07 |
| 7879396 | High aspect ratio performance coatings for biological microfluidics | Boris Kobrin, Romuald Nowak, Richard Yi | 2011-02-01 |
| 7776396 | Controlled vapor deposition of multilayered coatings adhered by an oxide layer | Boris Kobrin, Romuald Nowak, Richard Yi | 2010-08-17 |
| 7695775 | Controlled vapor deposition of biocompatible coatings over surface-treated substrates | Boris Kobrin, Romuald Nowak | 2010-04-13 |
| 7687110 | Method of in-line purification of CVD reactive precursor materials | Boris Kobrin, Romuald Nowak, Richard Yi | 2010-03-30 |
| 7638167 | Controlled deposition of silicon-containing coatings adhered by an oxide layer | Boris Kobrin, Romuald Nowak, Richard Yi | 2009-12-29 |
| 7618548 | Silicon-containing structure with deep etched features, and method of manufacture | Michael Rattner, Nicholas Pornsin-Sirirak, Yanping Li | 2009-11-17 |
| 7413774 | Method for controlled application of reactive vapors to produce thin films and coatings | Boris Kobrin, Romuald Nowak, Richard Yi | 2008-08-19 |
| 7074723 | Method of plasma etching a deeply recessed feature in a substrate using a plasma source gas modulated etchant system | Michael Rattner, Nicholas Pornsin-Sirirak, Yanping Li | 2006-07-11 |
| 7052622 | Method for measuring etch rates during a release process | Robert Z. Bachrach | 2006-05-30 |
| 7037854 | Method for chemical-mechanical jet etching of semiconductor structures | Robert Z. Bachrach | 2006-05-02 |
| 6936183 | Etch process for etching microstructures | Sofiane Soukane | 2005-08-30 |
| 6902947 | Integrated method for release and passivation of MEMS structures | Rolf Guenther, Michael Rattner, James A. Cooper, Toi Yue Becky Leung, Claes Bjorkman | 2005-06-07 |
| 6900133 | Method of etching variable depth features in a crystalline substrate | Michael Rattner, James A. Cooper, Rolf Guenther | 2005-05-31 |
| 6887732 | Microstructure devices, methods of forming a microstructure device and a method of forming a MEMS device | Vidyut Gopal | 2005-05-03 |