| 10712525 |
Packaging MEMS in fluidic environments |
Albert Ting, Daniel T. McCormick |
2020-07-14 |
| 9018724 |
Method of producing optical MEMS |
Albert Ting, Daniel T. McCormick |
2015-04-28 |
| 7618548 |
Silicon-containing structure with deep etched features, and method of manufacture |
Jeffrey D. Chinn, Nicholas Pornsin-Sirirak, Yanping Li |
2009-11-17 |
| 7074723 |
Method of plasma etching a deeply recessed feature in a substrate using a plasma source gas modulated etchant system |
Jeffrey D. Chinn, Nicholas Pornsin-Sirirak, Yanping Li |
2006-07-11 |
| 6902947 |
Integrated method for release and passivation of MEMS structures |
Jeffrey D. Chinn, Rolf Guenther, James A. Cooper, Toi Yue Becky Leung, Claes Bjorkman |
2005-06-07 |
| 6900133 |
Method of etching variable depth features in a crystalline substrate |
Jeffrey D. Chinn, James A. Cooper, Rolf Guenther |
2005-05-31 |
| 6849554 |
Method of etching a deep trench having a tapered profile in silicon |
Jeffrey D. Chinn |
2005-02-01 |
| 6846746 |
Method of smoothing a trench sidewall after a deep trench silicon etch process |
Jeffrey D. Chinn |
2005-01-25 |
| 6830950 |
Integrated method for release and passivation of MEMS structures |
Jeffrey D. Chinn, Rolf Guenther, James A. Cooper, Toi Yue Becky Leung |
2004-12-14 |
