Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12163911 | Capacitive sensor housing for chamber condition monitoring | Yaoling Pan, Patrick Tae, Leonard Tedeschi, Michael D. Willwerth | 2024-12-10 |
| 11581206 | Capacitive sensor for chamber condition monitoring | Yaoling Pan, Patrick Tae, Leonard Tedeschi, Jennifer Y. Sun, Philip Allan Kraus +6 more | 2023-02-14 |
| 11415538 | Capacitive sensor housing for chamber condition monitoring | Yaoling Pan, Patrick Tae, Leonard Tedeschi, Michael D. Willwerth | 2022-08-16 |
| 11088000 | Wafer based corrosion and time dependent chemical effects | Leonard Tedeschi, Benjamin Schwarz, Changhun Lee, Ping Han Hsieh, Adauto Diaz | 2021-08-10 |
| 10923405 | Wafer processing equipment having capacitive micro sensors | Leonard Tedeschi, Kartik Ramaswamy, Robert Meagley | 2021-02-16 |
| 10712525 | Packaging MEMS in fluidic environments | Albert Ting, Michael Rattner | 2020-07-14 |
| 10515862 | Wafer based corrosion and time dependent chemical effects | Leonard Tedeschi, Benjamin Schwarz, Changhun Lee, Ping Han Hsieh, Adauto Diaz | 2019-12-24 |
| 10083883 | Wafer processing equipment having capacitive micro sensors | Leonard Tedeschi, Kartik Ramaswamy, Robert Meagley | 2018-09-25 |
| 9975758 | Wafer processing equipment having exposable sensing layers | Leonard Tedeschi, Lili Ji, Olivier Joubert, Dmitry Lubomirsky, Philip Allan Kraus | 2018-05-22 |
| 9725302 | Wafer processing equipment having exposable sensing layers | Leonard Tedeschi, Lili Ji, Olivier Joubert, Dmitry Lubomirsky, Philip Allan Kraus | 2017-08-08 |
| 9018724 | Method of producing optical MEMS | Albert Ting, Michael Rattner | 2015-04-28 |