Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11088000 | Wafer based corrosion and time dependent chemical effects | Leonard Tedeschi, Benjamin Schwarz, Changhun Lee, Ping Han Hsieh, Daniel T. McCormick | 2021-08-10 |
| 10515862 | Wafer based corrosion and time dependent chemical effects | Leonard Tedeschi, Benjamin Schwarz, Changhun Lee, Ping Han Hsieh, Daniel T. McCormick | 2019-12-24 |
| 8992689 | Method for removing halogen-containing residues from substrate | Andrew Nguyen, Benjamin Schwarz, Eu Jin Lim, Jared Ahmad Lee, James P. Cruse +4 more | 2015-03-31 |
| 8845816 | Method extending the service interval of a gas distribution plate | Andrew Nguyen, Benjamin Schwarz, Eu Jin Lim, Jared Ahmad Lee, James P. Cruse +4 more | 2014-09-30 |
| 8097088 | Methods for processing substrates in a dual chamber processing system having shared resources | Eu Jin Lim, Benjamin Schwarz, James P. Cruse, Charles Hardy | 2012-01-17 |