Issued Patents All Time
Showing 25 most recent of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923405 | Wafer processing equipment having capacitive micro sensors | Leonard Tedeschi, Kartik Ramaswamy, Daniel T. McCormick | 2021-02-16 |
| 10083883 | Wafer processing equipment having capacitive micro sensors | Leonard Tedeschi, Kartik Ramaswamy, Daniel T. McCormick | 2018-09-25 |
| 8513111 | Forming semiconductor structures | Kevin P. O'Brien, Tian-An Chen, Michael Goodner, James M. Powers, Huey-Chiang Liou | 2013-08-20 |
| 8003293 | Pixelated photoresists | Michael Goodner, Bob Leet, Michael L. McSwiney | 2011-08-23 |
| 7875415 | Helical pixilated photoresist | — | 2011-01-25 |
| 7723008 | Photoactive adhesion promoter in a slam | Heidi Cao, Kevin P. O'Brien | 2010-05-25 |
| 7718528 | Photoactive adhesion promoter in a SLAM | Heidi Cao, Kevin P. O'Brien | 2010-05-18 |
| 7678527 | Methods and compositions for providing photoresist with improved properties for contacting liquids | Ernisse Putna, Wang Yueh | 2010-03-16 |
| 7658975 | Sealing porous dielectric materials | Grant Kloster, Michael Goodner, Kevin P. O'Brien | 2010-02-09 |
| 7615337 | Photoactive resist capping layer | Michael L. McSwiney, Michael Goodner, Robert Leet, Manish Chandhok | 2009-11-10 |
| 7615329 | Branching self-assembling photoresist with decomposable backbone | — | 2009-11-10 |
| 7611828 | Photoactive adhesion promoter | — | 2009-11-03 |
| 7572732 | Method to modulate etch rate in SLAM | Michael Goodner, Kevin P. O'Brien | 2009-08-11 |
| 7560165 | Sealing porous dielectric materials | Grant Kloster, Michael Goodner, Kevin P. O'Brien, Don Bruner | 2009-07-14 |
| 7501230 | Photoactive adhesion promoter | — | 2009-03-10 |
| 7452728 | Metal ion separation from aqueous solutions using photoswitchable ionophores | Bob Leet, Michael Goodner, Michael L. McSwiney | 2008-11-18 |
| 7405419 | Unidirectionally conductive materials for interconnection | Reza Golzarian, Seiichi Morimoto, Mansour Moinpour | 2008-07-29 |
| 7374867 | Enhancing photoresist performance using electric fields | Robert L. Bristol, Heidi Cao, Manish Chandhok, Vijayakumar Ramachandrarao | 2008-05-20 |
| 7375030 | Method to assay sacrificial light absorbing materials and spin on glass materials for chemical origin of defectivity | Hok-Kin Choi | 2008-05-20 |
| 7361455 | Anti-reflective coatings | Shan Clark, Ernisse Putna | 2008-04-22 |
| 7344972 | Photosensitive dielectric layer | Michael Goodner, Kevin P. O'Brien, Grant Kloster | 2008-03-18 |
| 7259109 | Electrospray and enhanced electrospray deposition of thin films on semiconductor substrates | — | 2007-08-21 |
| 7241707 | Layered films formed by controlled phase segregation | Michael J. Leeson, Michael Goodner, Bob Leet, Michael L. McSwiney, Shan Clark | 2007-07-10 |
| 7241560 | Basic quencher/developer solutions for photoresists | Shan Clark, Kim-Khanh Ho, James S. Clarke, Ernisse Putna, Wang Yueh | 2007-07-10 |
| 7235344 | Energy harvesting molecules and photoresist technology | Michael Goodner, Robert Leet, Michael L. McSwiney | 2007-06-26 |