| 10923405 |
Wafer processing equipment having capacitive micro sensors |
Leonard Tedeschi, Kartik Ramaswamy, Daniel T. McCormick |
2021-02-16 |
$36,444,000 |
| 10083883 |
Wafer processing equipment having capacitive micro sensors |
Leonard Tedeschi, Kartik Ramaswamy, Daniel T. McCormick |
2018-09-25 |
$34,271,000 |
| 8513111 |
Forming semiconductor structures |
Kevin P. O'Brien, Tian-An Chen, Michael Goodner, James M. Powers, Huey-Chiang Liou |
2013-08-20 |
$17,431,000 |
| 8003293 |
Pixelated photoresists |
Michael Goodner, Bob Leet, Michael L. McSwiney |
2011-08-23 |
$17,183,000 |
| 7875415 |
Helical pixilated photoresist |
— |
2011-01-25 |
$27,856,000 |
| 7723008 |
Photoactive adhesion promoter in a slam |
Heidi Cao, Kevin P. O'Brien |
2010-05-25 |
$11,401,000 |
| 7718528 |
Photoactive adhesion promoter in a SLAM |
Heidi Cao, Kevin P. O'Brien |
2010-05-18 |
$11,091,000 |
| 7678527 |
Methods and compositions for providing photoresist with improved properties for contacting liquids |
Ernisse Putna, Wang Yueh |
2010-03-16 |
$22,589,000 |
| 7658975 |
Sealing porous dielectric materials |
Grant Kloster, Michael Goodner, Kevin P. O'Brien |
2010-02-09 |
$29,195,000 |
| 7615337 |
Photoactive resist capping layer |
Michael L. McSwiney, Michael Goodner, Robert Leet, Manish Chandhok |
2009-11-10 |
$23,460,000 |
| 7615329 |
Branching self-assembling photoresist with decomposable backbone |
— |
2009-11-10 |
$23,460,000 |
| 7611828 |
Photoactive adhesion promoter |
— |
2009-11-03 |
|
| 7572732 |
Method to modulate etch rate in SLAM |
Michael Goodner, Kevin P. O'Brien |
2009-08-11 |
$32,202,000 |
| 7560165 |
Sealing porous dielectric materials |
Grant Kloster, Michael Goodner, Kevin P. O'Brien, Don Bruner |
2009-07-14 |
$21,399,000 |
| 7501230 |
Photoactive adhesion promoter |
— |
2009-03-10 |
|
| 7452728 |
Metal ion separation from aqueous solutions using photoswitchable ionophores |
Bob Leet, Michael Goodner, Michael L. McSwiney |
2008-11-18 |
$14,632,000 |
| 7405419 |
Unidirectionally conductive materials for interconnection |
Reza Golzarian, Seiichi Morimoto, Mansour Moinpour |
2008-07-29 |
$26,149,000 |
| 7374867 |
Enhancing photoresist performance using electric fields |
Robert L. Bristol, Heidi Cao, Manish Chandhok, Vijayakumar Ramachandrarao |
2008-05-20 |
$25,766,000 |
| 7375030 |
Method to assay sacrificial light absorbing materials and spin on glass materials for chemical origin of defectivity |
Hok-Kin Choi |
2008-05-20 |
$25,766,000 |
| 7361455 |
Anti-reflective coatings |
Shan Clark, Ernisse Putna |
2008-04-22 |
$13,499,000 |
| 7344972 |
Photosensitive dielectric layer |
Michael Goodner, Kevin P. O'Brien, Grant Kloster |
2008-03-18 |
$17,443,000 |
| 7259109 |
Electrospray and enhanced electrospray deposition of thin films on semiconductor substrates |
— |
2007-08-21 |
$15,364,000 |
| 7241707 |
Layered films formed by controlled phase segregation |
Michael J. Leeson, Michael Goodner, Bob Leet, Michael L. McSwiney, Shan Clark |
2007-07-10 |
$14,625,000 |
| 7241560 |
Basic quencher/developer solutions for photoresists |
Shan Clark, Kim-Khanh Ho, James S. Clarke, Ernisse Putna, Wang Yueh |
2007-07-10 |
$14,625,000 |
| 7235344 |
Energy harvesting molecules and photoresist technology |
Michael Goodner, Robert Leet, Michael L. McSwiney |
2007-06-26 |
$20,503,000 |
