Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12180583 | Methods of forming low resistivity titanium nitride thin film in horizontal vias and related devices | Andrew C. Kummel, Cheng-Hsuan Kuo, SeongUk Yun, Ravindra KANJOLIA, Daniel Moser | 2024-12-31 |
| 7704895 | Deposition method for high-k dielectric materials | Adrien LaVoie, John J. Plombon, Juan E. Dominguez, Harsono S. Simka | 2010-04-27 |
| 7469443 | Brush for cleaning wafer | Huey-Chiang Liou, Alexander Tregub | 2008-12-30 |
| 7470450 | Forming a silicon nitride film | Michael L. McSwiney, Michael Goodner | 2008-12-30 |
| 7405419 | Unidirectionally conductive materials for interconnection | Reza Golzarian, Robert Meagley, Seiichi Morimoto | 2008-07-29 |
| 7383723 | Detecting particle agglomeration in chemical mechanical polishing slurries | Alexander Tregub | 2008-06-10 |
| 7365375 | Organic-framework zeolite interlayer dielectrics | Michael Goodner, Grant Kloster, Boyan Boyanov | 2008-04-29 |
| 7229484 | Pre-coated particles for chemical mechanical polishing | Reza Golzarian, Andrea Oehler | 2007-06-12 |
| 7125321 | Multi-platen multi-slurry chemical mechanical polishing process | Matthew J. Prince, Francis M. Tambwe, Gary Ding | 2006-10-24 |
| 7084053 | Unidirectionally conductive materials for interconnection | Reza Golzarian, Robert Meagley, Seiichi Morimoto | 2006-08-01 |
| 7048610 | Conditioning polishing pad for chemical-mechanical polishing | Alexander Tregub, Victor K. Souw | 2006-05-23 |
| 7048434 | Thermal analysis and characterization of layers and multiple layer structures | Alex Tregub, David Fryer | 2006-05-23 |
| 6976907 | Polishing pad conditioning | Reza Golzarian | 2005-12-20 |
| 6875086 | Surface planarization | Reza Golzarian | 2005-04-05 |
| 6495470 | Contact and via fabrication technologies | S. M. Reza Sadjadi, Te Hua Lin, Farhad Moghadam | 2002-12-17 |
| 6365521 | Passivation for tight metal geometry | Jan V. Shubert, Glen Wada, Yang-Chin Shih, Ken Schatz | 2002-04-02 |
| 6334229 | Apparatus for cleaning edges of contaminated substrates | Hoang T. Nguyen, Mohsen Salek, Young C. Park, Tom Bramblett, John deLarios +3 more | 2002-01-01 |
| 5883436 | Contact and via fabrication technologies | S. M. Reza Sadjadi, Te Hua Lin, Farhad Moghadam | 1999-03-16 |
| 5861066 | Method and apparatus for cleaning edges of contaminated substrates | Hoang T. Nguyen, Mohsen Salek, Young C. Park, Tom Bramblett, John deLarios +3 more | 1999-01-19 |