| 10515834 |
Multi-station tool with wafer transfer microclimate systems |
Richard M. Blank, Richard H. Gould, Efrain Quiles |
2019-12-24 |
$46,593,000 |
| 9502294 |
Method and system for wafer level singulation |
Klaus Schuegraf, Seshadri Ramaswami, Michael R. Rice, Claes Bjorkman |
2016-11-22 |
$14,203,000 |
| 8580615 |
Method and system for wafer level singulation |
Klaus Schuegraf, Seshadri Ramaswami, Michael R. Rice, Claes Bjorkman |
2013-11-12 |
$7,355,000 |
| 8550031 |
Cluster tool architecture for processing a substrate |
Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more |
2013-10-08 |
$11,511,000 |
| 8215262 |
Cluster tool architecture for processing a substrate |
Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more |
2012-07-10 |
$5,553,000 |
| 8181596 |
Cluster tool architecture for processing a substrate |
Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more |
2012-05-22 |
$10,508,000 |
| 8146530 |
Cluster tool architecture for processing a substrate |
Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more |
2012-04-03 |
$7,743,000 |
| 7925377 |
Cluster tool architecture for processing a substrate |
Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more |
2011-04-12 |
$6,345,000 |
| 7819079 |
Cartesian cluster tool configuration for lithography type processes |
Eric A. Englhardt, Michael R. Rice, Jeffrey C. Hudgens, Steve Hongkham, Jay D. Pinson, II +3 more |
2010-10-26 |
$13,462,000 |
| 7743728 |
Cluster tool architecture for processing a substrate |
Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more |
2010-06-29 |
$7,165,000 |
| 7694647 |
Cluster tool architecture for processing a substrate |
Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more |
2010-04-13 |
$8,039,000 |
| 7357842 |
Cluster tool architecture for processing a substrate |
Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more |
2008-04-15 |
|
| 7115024 |
Profile control platen |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Thomas H. Osterheld, Sen-Hou Ko |
2006-10-03 |
$12,847,000 |
| 6913518 |
Profile control platen |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Thomas H. Osterheld, Sen-Hou Ko |
2005-07-05 |
$11,772,000 |
| 6709218 |
Robot blade for semiconductor processing equipment |
Frederik W. Freerks, Tetsuya Ishikawa, Timothy Wang, Jeffrey C. Hudgens, James R. Ciulik +2 more |
2004-03-23 |
$30,776,000 |
| 6390904 |
Retainers and non-abrasive liners used in chemical mechanical polishing |
Allan Gleason, Manoocher Birang, John Prince, Syed H. Askari |
2002-05-21 |
$35,703,000 |
| 6334229 |
Apparatus for cleaning edges of contaminated substrates |
Mansour Moinpour, Hoang T. Nguyen, Young C. Park, Tom Bramblett, John deLarios +3 more |
2002-01-01 |
|
| 5861066 |
Method and apparatus for cleaning edges of contaminated substrates |
Mansour Moinpour, Hoang T. Nguyen, Young C. Park, Tom Bramblett, John deLarios +3 more |
1999-01-19 |
$152,384,000 |
