Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515834 | Multi-station tool with wafer transfer microclimate systems | Richard M. Blank, Richard H. Gould, Efrain Quiles | 2019-12-24 |
| 9502294 | Method and system for wafer level singulation | Klaus Schuegraf, Seshadri Ramaswami, Michael R. Rice, Claes Bjorkman | 2016-11-22 |
| 8580615 | Method and system for wafer level singulation | Klaus Schuegraf, Seshadri Ramaswami, Michael R. Rice, Claes Bjorkman | 2013-11-12 |
| 8550031 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2013-10-08 |
| 8215262 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-07-10 |
| 8181596 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-05-22 |
| 8146530 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-04-03 |
| 7925377 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2011-04-12 |
| 7819079 | Cartesian cluster tool configuration for lithography type processes | Eric A. Englhardt, Michael R. Rice, Jeffrey C. Hudgens, Steve Hongkham, Jay D. Pinson, II +3 more | 2010-10-26 |
| 7743728 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2010-06-29 |
| 7694647 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2010-04-13 |
| 7357842 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2008-04-15 |
| 7115024 | Profile control platen | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Thomas H. Osterheld, Sen-Hou Ko | 2006-10-03 |
| 6913518 | Profile control platen | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Thomas H. Osterheld, Sen-Hou Ko | 2005-07-05 |
| 6709218 | Robot blade for semiconductor processing equipment | Frederik W. Freerks, Tetsuya Ishikawa, Timothy Wang, Jeffrey C. Hudgens, James R. Ciulik +2 more | 2004-03-23 |
| 6390904 | Retainers and non-abrasive liners used in chemical mechanical polishing | Allan Gleason, Manoocher Birang, John Prince, Syed H. Askari | 2002-05-21 |
| 6334229 | Apparatus for cleaning edges of contaminated substrates | Mansour Moinpour, Hoang T. Nguyen, Young C. Park, Tom Bramblett, John deLarios +3 more | 2002-01-01 |
| 5861066 | Method and apparatus for cleaning edges of contaminated substrates | Mansour Moinpour, Hoang T. Nguyen, Young C. Park, Tom Bramblett, John deLarios +3 more | 1999-01-19 |