Issued Patents All Time
Showing 25 most recent of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12262559 | Monolithic complementary field-effect transistors having carbon-doped release layers | Andrew Cockburn, Vanessa Pena, Daniel Philippe Cellier, John Tolle, Thomas Kirschenheiter +3 more | 2025-03-25 |
| 12211947 | Copper, indium, gallium, selenium (CIGS) films with improved quantum efficiency | Philip Hsin-hua Li | 2025-01-28 |
| 11728449 | Copper, indium, gallium, selenium (CIGS) films with improved quantum efficiency | Philip Hsin-hua Li | 2023-08-15 |
| 11094573 | Method and apparatus for thin wafer carrier | Jingyu Qiao, Qiwei Liang, Viachslav Babayan, Srinivas D. Nemani | 2021-08-17 |
| 11088293 | Methods and apparatus for producing copper-indium-gallium-selenium (CIGS) film | Philip Hsin-hua Li | 2021-08-10 |
| 11018275 | Method of creating CIGS photodiode for image sensor applications | Philip Hsin-hua Li | 2021-05-25 |
| 10978334 | Sealing structure for workpiece to substrate bonding in a processing chamber | Chin Hock Toh, Tuck Foong Koh, Sriskantharajah Thirunavukarasu, Jen Sern Lew, Arvind Sundarrajan | 2021-04-13 |
| 10879094 | Electrostatic chucking force measurement tool for process chamber carriers | Srinivas D. Nemani, Gautam Pisharody, Shambhu N. Roy, Niranjan Kumar | 2020-12-29 |
| 10665494 | Automated apparatus to temporarily attach substrates to carriers without adhesives for processing | Niranjan Kumar, Shay Assaf, Amikam Sade, Andy Constant, Maureen Frances Breiling | 2020-05-26 |
| 9502294 | Method and system for wafer level singulation | Klaus Schuegraf, Michael R. Rice, Mohsen Salek, Claes Bjorkman | 2016-11-22 |
| 8940619 | Method of diced wafer transportation | Wei-Sheng Lei, Brad Eaton, Aparna Iyer, Saravjeet Singh, Todd Egan +1 more | 2015-01-27 |
| 8580615 | Method and system for wafer level singulation | Klaus Schuegraf, Michael R. Rice, Mohsen Salek, Claes Bjorkman | 2013-11-12 |
| 6899799 | Method and apparatus for improving sidewall coverage during sputtering in a chamber having an inductively coupled plasma | Kenny King-Tai Ngan, Ying HUI | 2005-05-31 |
| 6627542 | Continuous, non-agglomerated adhesion of a seed layer to a barrier layer | Srinivas Gandikota, Rong Tao, Liang-Yuh Chen | 2003-09-30 |
| 6599399 | Sputtering method to generate ionized metal plasma using electron beams and magnetic field | Zheng Xu | 2003-07-29 |
| 6521107 | Target for use in magnetron sputtering of nickel for forming metallization films having consistent uniformity through life | Murali Abburi | 2003-02-18 |
| 6475356 | Method and apparatus for improving sidewall coverage during sputtering in a chamber having an inductively coupled plasma | Ken Ngan, Simon Wing-Lok Hui | 2002-11-05 |
| 6472867 | Target for use in magnetron sputtering of nickel for forming metallization films having consistent uniformity through life | Murali Abburi | 2002-10-29 |
| 6455921 | Fabricating plug and near-zero overlap interconnect line | Jaim Nulman | 2002-09-24 |
| 6436207 | Manufacture of target for use in magnetron sputtering of nickel and like magnetic metals for forming metallization films having consistent uniformity through life | Murali Abburi | 2002-08-20 |
| 6420260 | Ti/Tinx underlayer which enables a highly <111> oriented aluminum interconnect | Kenny King-Tai Ngan | 2002-07-16 |
| 6391163 | Method of enhancing hardness of sputter deposited copper films | Vikram Pavate, Murali Abburi, Murali Narasimhan | 2002-05-21 |
| 6228186 | Method for manufacturing metal sputtering target for use in DC magnetron so that target has reduced number of conduction anomalies | Vikram Pavate, Keith J. Hansen, Glen T. Mori, Murali Narasimhan, Jaim Nulman | 2001-05-08 |
| 6171455 | Target for use in magnetron sputtering of aluminum for forming metallization films having low defect densities and methods for manufacturing and using such target | Vikram Pavate, Keith J. Hansen, Glen T. Mori, Murali Narasimhan, Jaim Nulman | 2001-01-09 |
| 6149777 | Method of producing smooth titanium nitride films having low resistivity | Kenny King-Tai Ngan | 2000-11-21 |