Issued Patents All Time
Showing 25 most recent of 212 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12404584 | Parallel atomic layer deposition of target element interiors | Yogesh Tomar, Nikshep Patil, Kirubanandan Shanmugam Naina, Hanish Kumar Panavalappil Kumarankutty, Gayatri Natu +4 more | 2025-09-02 |
| 12334383 | Substrate support gap pumping to prevent glow discharge and light-up | James D. Carducci, Kenneth S. Collins, Kartik Ramaswamy, Silverst Rodrigues, Yang Yang | 2025-06-17 |
| D1076836 | Mainframe with integrated lid | Michael Kuchar, Robert M. McAndrew, Travis Morey, Adam J. Wyatt, Ofer Amir +2 more | 2025-05-27 |
| 12305283 | Dithering or dynamic offsets for improved uniformity | Joseph AuBuchon, Sanjeev Baluja, Arkaprava Dan, Hanhong Chen | 2025-05-20 |
| 12274007 | Electronic device manufacturing system | Jeffrey C. Hudgens | 2025-04-08 |
| 12211714 | Reconfigurable mainframe with replaceable interface plate | — | 2025-01-28 |
| 12209307 | Zone-controlled rare-earth oxide ALD and CVD coatings | Xiaowei Wu, Jennifer Y. Sun | 2025-01-28 |
| 12205843 | Ground electrode formed in an electrostatic chuck for a plasma processing chamber | Vijay D. Parkhe | 2025-01-21 |
| 12159796 | Systems and methods for integrating load locks into a factory interface footprint space | Jacob Newman, Andrew J. Constant, Paul B. Reuter, Shay Assaf, Sushant S. Koshti | 2024-12-03 |
| 12142508 | Factory interface robots usable with integrated load locks | Sushant S. Koshti, Paul B. Reuter, David Phillips, Jacob Newman, Andrew J. Constant +6 more | 2024-11-12 |
| 12142500 | Side storage pods, equipment front end modules, and methods for processing substrates | Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Dean C. Hruzek, Jeffrey A. Brodine | 2024-11-12 |
| 12091749 | Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outlet | Tetsuya Ishikawa, Swaminathan Srinivasan, Matthias Bauer, Manjunath Subbanna, Ala Moradian +4 more | 2024-09-17 |
| 12094752 | Wafer edge ring lifting solution | Yogananda Sarode Vishwanath, Sunil Srinivasan, Rajinder Dhindsa, Steven E. Babayan, Olivier Luere +2 more | 2024-09-17 |
| 12077861 | Dithering or dynamic offsets for improved uniformity | Joseph AuBuchon, Sanjeev Baluja, Arkaprava Dan, Hanhong Chen | 2024-09-03 |
| 12074010 | Atomic layer deposition part coating chamber | Hanish Kumar Panavalappil Kumarankutty, Steven Marcus, Kirubanandan Naina SHANMUGAM, Sriharsha DHARMAPURA SATHYANARAYANAMURTHY, Madhukar KRISHNA +3 more | 2024-08-27 |
| 12060651 | Chamber architecture for epitaxial deposition and advanced epitaxial film applications | Tetsuya Ishikawa, Swaminathan Srinivasan, Kartik Shah, Ala Moradian, Manjunath Subbanna +2 more | 2024-08-13 |
| 12049696 | Plasma resistant process chamber lid | Xiaowei Wu, Jennifer Y. Sun | 2024-07-30 |
| 12018372 | Gas injector for epitaxy and CVD chamber | Tetsuya Ishikawa, Swaminathan Srinivasan, Matthias Bauer, Ala Moradian, Manjunath Subbanna +4 more | 2024-06-25 |
| 12001193 | Apparatus for environmental control of dies and substrates for hybrid bonding | Ying Wang, Xundong Dai, Guan Huei See, Ruiping Wang, Hari Ponnekanti +1 more | 2024-06-04 |
| D1029066 | Mainframe of dual-robot substrate processing system | Michael Kuchar, Travis Morey, Adam J. Wyatt, Ofer Amir | 2024-05-28 |
| 11990358 | Sealed substrate carriers and systems and methods for transporting substrates | Jeffery Hudgens | 2024-05-21 |
| 11894257 | Single wafer processing environments with spatial separation | Joseph AuBuchon, Sanjeev Baluja, Mandyam Sriram | 2024-02-06 |
| 11782404 | Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls | Dean C. Hruzek | 2023-10-10 |
| D992611 | Mainframe of substrate processing system | Michael Kuchar, Travis Morey, Adam J. Wyatt, Ofer Amir | 2023-07-18 |
| D991994 | Mainframe of substrate processing system | Michael Kuchar, Travis Morey, Adam J. Wyatt, Ofer Amir | 2023-07-11 |