| D1098220 |
Mainframe of dual-robot substrate processing system |
Michael R. Rice, Michael Kuchar, Adam J. Wyatt, Ofer Amir |
2025-10-14 |
|
| D1076836 |
Mainframe with integrated lid |
Michael R. Rice, Michael Kuchar, Robert M. McAndrew, Adam J. Wyatt, Ofer Amir +2 more |
2025-05-27 |
|
| D1029066 |
Mainframe of dual-robot substrate processing system |
Michael R. Rice, Michael Kuchar, Adam J. Wyatt, Ofer Amir |
2024-05-28 |
|
| D992611 |
Mainframe of substrate processing system |
Michael R. Rice, Michael Kuchar, Adam J. Wyatt, Ofer Amir |
2023-07-18 |
|
| D991994 |
Mainframe of substrate processing system |
Michael R. Rice, Michael Kuchar, Adam J. Wyatt, Ofer Amir |
2023-07-11 |
|
| D973737 |
Mainframe of substrate processing system |
Michael R. Rice, Michael Kuchar, Adam J. Wyatt, Ofer Amir |
2022-12-27 |
|
| D973116 |
Mainframe of substrate processing system |
Michael R. Rice, Michael Kuchar, Adam J. Wyatt, Ofer Amir |
2022-12-20 |
|
| 10758045 |
Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods |
Eran Weiss, Nir Merry, Paul B. Reuter, Izya Kremerman, Jeffrey C. Hudgens +1 more |
2020-09-01 |
$30,946,000 |
| 10381247 |
Gas systems and methods for chamber ports |
Nagendra Madiwal, Robert Irwin Decottignies, Andrew Nguyen, Paul B. Reuter, Angela Rose Sico +2 more |
2019-08-13 |
$55,265,000 |
| 10278501 |
Load lock door assembly, load lock apparatus, electronic device processing systems, and methods |
Eran Weiss, Nir Merry, Paul B. Reuter, Izya Kremerman, Jeffrey C. Hudgens +1 more |
2019-05-07 |
$13,988,000 |
| 10119191 |
High flow gas diffuser assemblies, systems, and methods |
— |
2018-11-06 |
$24,517,000 |
| 10056274 |
System and method for forming a sealed chamber |
Michael R. Rice, Paul B. Reuter, William (Ty) Weaver, Natan Schlimoff, Igor Krivts (Krayvitz) +3 more |
2018-08-21 |
$27,925,000 |
| 9441792 |
Transfer chamber gas purge apparatus, electronic device processing systems, and purge methods |
Edward Ng, Eric A. Englhardt, Ayan Majumdar, Steve Hongkham |
2016-09-13 |
$19,510,000 |
| 9435025 |
Gas apparatus, systems, and methods for chamber ports |
Nagendra Madiwal, Robert Irwin Decottignies, Andrew Nguyen, Paul B. Reuter, Angela Rose Sico +2 more |
2016-09-06 |
$45,889,000 |
| 8486194 |
Apparatus for efficient removal of halogen residues from etched substrates |
Kenneth J. Bhang, Matthew F. Davis, James D. Carducci |
2013-07-16 |
$14,286,000 |
| 8293016 |
Apparatus for efficient removal of halogen residues from etched substrates |
Kenneth J. Bahng, Matthew F. Davis, James D. Carducci |
2012-10-23 |
$4,153,000 |
