Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1076836 | Mainframe with integrated lid | Michael R. Rice, Michael Kuchar, Robert M. McAndrew, Adam J. Wyatt, Ofer Amir +2 more | 2025-05-27 |
| D1029066 | Mainframe of dual-robot substrate processing system | Michael R. Rice, Michael Kuchar, Adam J. Wyatt, Ofer Amir | 2024-05-28 |
| D992611 | Mainframe of substrate processing system | Michael R. Rice, Michael Kuchar, Adam J. Wyatt, Ofer Amir | 2023-07-18 |
| D991994 | Mainframe of substrate processing system | Michael R. Rice, Michael Kuchar, Adam J. Wyatt, Ofer Amir | 2023-07-11 |
| D973737 | Mainframe of substrate processing system | Michael R. Rice, Michael Kuchar, Adam J. Wyatt, Ofer Amir | 2022-12-27 |
| D973116 | Mainframe of substrate processing system | Michael R. Rice, Michael Kuchar, Adam J. Wyatt, Ofer Amir | 2022-12-20 |
| 10758045 | Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods | Eran Weiss, Nir Merry, Paul B. Reuter, Izya Kremerman, Jeffrey C. Hudgens +1 more | 2020-09-01 |
| 10381247 | Gas systems and methods for chamber ports | Nagendra Madiwal, Robert Irwin Decottignies, Andrew Nguyen, Paul B. Reuter, Angela Rose Sico +2 more | 2019-08-13 |
| 10278501 | Load lock door assembly, load lock apparatus, electronic device processing systems, and methods | Eran Weiss, Nir Merry, Paul B. Reuter, Izya Kremerman, Jeffrey C. Hudgens +1 more | 2019-05-07 |
| 10119191 | High flow gas diffuser assemblies, systems, and methods | — | 2018-11-06 |
| 10056274 | System and method for forming a sealed chamber | Michael R. Rice, Paul B. Reuter, William (Ty) Weaver, Natan Schlimoff, Igor Krivts (Krayvitz) +3 more | 2018-08-21 |
| 9441792 | Transfer chamber gas purge apparatus, electronic device processing systems, and purge methods | Edward Ng, Eric A. Englhardt, Ayan Majumdar, Steve Hongkham | 2016-09-13 |
| 9435025 | Gas apparatus, systems, and methods for chamber ports | Nagendra Madiwal, Robert Irwin Decottignies, Andrew Nguyen, Paul B. Reuter, Angela Rose Sico +2 more | 2016-09-06 |
| 8486194 | Apparatus for efficient removal of halogen residues from etched substrates | Kenneth J. Bhang, Matthew F. Davis, James D. Carducci | 2013-07-16 |
| 8293016 | Apparatus for efficient removal of halogen residues from etched substrates | Kenneth J. Bahng, Matthew F. Davis, James D. Carducci | 2012-10-23 |