Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400885 | Modular multi-chamber processing tool having link chamber for ultra high vacuum processes | Marek Radko | 2025-08-26 |
| 12232299 | Methods and apparatus for cooling a substrate support | Roger B. Fish, Steven Szudarski, Shane Lawrence Kintner | 2025-02-18 |
| 10381247 | Gas systems and methods for chamber ports | Nagendra Madiwal, Andrew Nguyen, Paul B. Reuter, Angela Rose Sico, Michael Kuchar +2 more | 2019-08-13 |
| 9435025 | Gas apparatus, systems, and methods for chamber ports | Nagendra Madiwal, Andrew Nguyen, Paul B. Reuter, Angela Rose Sico, Michael Kuchar +2 more | 2016-09-06 |
| 9147592 | Linked vacuum processing tools and methods of using the same | Eric A. Englhardt, Steve Szudarski, Andrew Scott Cornelius, Amitabh Puri, Michael R. Rice +5 more | 2015-09-29 |