Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D938373 | Substrate transfer structure | Jason M. Schaller, Benjamin B. Riordon, Paul Forderhase, Gary Wyka, Jeffrey C. Hudgens +7 more | 2021-12-14 |
| 10381247 | Gas systems and methods for chamber ports | Nagendra Madiwal, Robert Irwin Decottignies, Andrew Nguyen, Paul B. Reuter, Angela Rose Sico +2 more | 2019-08-13 |
| 9435025 | Gas apparatus, systems, and methods for chamber ports | Nagendra Madiwal, Robert Irwin Decottignies, Andrew Nguyen, Paul B. Reuter, Angela Rose Sico +2 more | 2016-09-06 |
| 8698889 | Metrology system for imaging workpiece surfaces at high robot transfer speeds | Abraham Ravid, Todd Egan, Karen Lingel, Hari Kishore Ambal, Edward W. Budiarto | 2014-04-15 |