Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11715193 | Color imaging for CMP monitoring | Dominic J. Benvegnu, Robert D. Tolles, Boguslaw A. Swedek | 2023-08-01 |
| 11430680 | Position and temperature monitoring of ALD platen susceptor | Kevin Griffin, Joseph Yudovsky, Kaushal Gangakhedkar, Dmitry A. Dzilno, Alex Minkovich | 2022-08-30 |
| 11119051 | Particle detection for substrate processing | Todd Egan, Mehdi Vaez-Iravani, Samer Banna, Kyle Tantiwong, Gregory L. Kirk +1 more | 2021-09-14 |
| 10845317 | Particle detection for substrate processing | Todd Egan, Mehdi Vaez-Iravani, Samer Banna, Kyle Tantiwong, Gregory L. Kirk +1 more | 2020-11-24 |
| 10565701 | Color imaging for CMP monitoring | Dominic J. Benvegnu, Robert D. Tolles, Boguslaw A. Swedek | 2020-02-18 |
| 10312120 | Position and temperature monitoring of ALD platen susceptor | Kevin Griffin, Joseph Yudovsky, Kaushal Gangakhedkar, Dmitry A. Dzilno, Alex Minkovich | 2019-06-04 |
| 10260855 | Electroplating tool with feedback of metal thickness distribution and correction | Todd Egan, Edward W. Budiarto, Robert O. Miller, Bridger Earl HOERNER, Robert W. Batz, Jr. +1 more | 2019-04-16 |
| 10196741 | Wafer placement and gap control optimization through in situ feedback | Kevin Griffin, Alex Minkovich, Somesh Khandelwal, Joseph Yudovsky, Todd Egan | 2019-02-05 |
| 9880233 | Methods and apparatus to determine parameters in metal-containing films | — | 2018-01-30 |
| 9631919 | Non-contact sheet resistance measurement of barrier and/or seed layers prior to electroplating | Dmitry A. Dzilno, Todd Egan, Robert O. Miller | 2017-04-25 |
| 9490154 | Method of aligning substrate-scale mask with substrate | Todd Egan, Paul Connors, Sergey Starik, Ganesh Balasubramanian | 2016-11-08 |
| 9405287 | Apparatus and method for optical calibration of wafer placement by a robot | Todd Egan, Eran Weiss, Michael R. Rice, Izya Kremerman | 2016-08-02 |
| 8698889 | Metrology system for imaging workpiece surfaces at high robot transfer speeds | Todd Egan, Karen Lingel, Mitchell DiSanto, Hari Kishore Ambal, Edward W. Budiarto | 2014-04-15 |
| 8639377 | Metrology for GST film thickness and phase | Kun Xu, Feng Q. Liu, Yuchun Wang, Wen-Chiang Tu | 2014-01-28 |
| 8620064 | Method for imaging workpiece surfaces at high robot transfer speeds with reduction or prevention of motion-induced distortion | Todd Egan, Karen Lingel | 2013-12-31 |
| 8452077 | Method for imaging workpiece surfaces at high robot transfer speeds with correction of motion-induced distortion | Todd Egan, Karen Lingel | 2013-05-28 |
| 8125654 | Methods and apparatus for measuring substrate edge thickness during polishing | Dominic J. Benvegnu, Boguslaw A. Swedek, Sen-Hou Ko, Paul V. Miller | 2012-02-28 |
| 8014004 | Determining physical property of substrate | Boguslaw A. Swedek, Jeffrey Drue David, Jun Qian, Ingemar Carlsson, Dominic J. Benvegnu +2 more | 2011-09-06 |
| 7952708 | High throughput measurement system | Boguslaw A. Swedek, Dominic J. Benvegnu, Jeffrey Drue David, Jun Qian, Sidney P. Huey +3 more | 2011-05-31 |
| 7840375 | Methods and apparatus for generating a library of spectra | Boguslaw A. Swedek, Dominic J. Benvegnu, Jeffrey Drue David, Jun Qian, Sidney P. Huey +3 more | 2010-11-23 |
| 7746485 | Determining physical property of substrate | Boguslaw A. Swedek, Jeffrey Drue David, Jun Qian, Ingemar Carlsson, Dominic J. Benvegnu +2 more | 2010-06-29 |
| 7444198 | Determining physical property of substrate | Boguslaw A. Swedek, Jeffrey Drue David, Jun Qian, Ingemar Carlsson, Dominic J. Benvegnu +2 more | 2008-10-28 |