Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421601 | Rotary reactor for uniform particle coating with thin films | Colin C. Neikirk, Pravin K. Narwankar, Visweswaren Sivaramakrishnan, Jonathan Frankel, David Masayuki Ishikawa +2 more | 2025-09-23 |
| 12230530 | Apparatus and methods for semiconductor processing | Joseph Yudovsky | 2025-02-18 |
| 12146217 | Particle coating methods and apparatus | Jonathan Frankel, Colin C. Neikirk, Pravin K. Narwankar | 2024-11-19 |
| 12112969 | Apparatus and methods for wafer chucking on a susceptor for ALD | Joseph Yudovsky | 2024-10-08 |
| 11984343 | Apparatus and methods for semiconductor processing | Joseph Yudovsky | 2024-05-14 |
| 11810810 | Contour pocket and hybrid susceptor for wafer uniformity | Kallol Bera, Joseph Yudovsky | 2023-11-07 |
| 11560804 | Methods for depositing coatings on aerospace components | Yuriy Melnik, Sukti Chatterjee, Jonathan Frankel, Lance A. Scudder, Pravin K. Narwankar +4 more | 2023-01-24 |
| 11557501 | Contour pocket and hybrid susceptor for wafer uniformity | Kallol Bera, Joseph Yudovsky | 2023-01-17 |
| 11430680 | Position and temperature monitoring of ALD platen susceptor | Abraham Ravid, Kevin Griffin, Joseph Yudovsky, Dmitry A. Dzilno, Alex Minkovich | 2022-08-30 |
| 11384648 | Methods for depositing coatings on aerospace components | Yuriy Melnik, Sukti Chatterjee, Jonathan Frankel, Lance A. Scudder, Pravin K. Narwankar +4 more | 2022-07-12 |
| 11242599 | Particle coating methods and apparatus | Jonathan Frankel, Colin C. Neikirk, Pravin K. Narwankar | 2022-02-08 |
| 11180846 | Fine leveling of large carousel based susceptor | — | 2021-11-23 |
| 11180851 | Rotary reactor for uniform particle coating with thin films | Colin C. Neikirk, Pravin K. Narwankar, Visweswaren Sivaramakrishnan, Jonathan Frankel, David Masayuki Ishikawa +2 more | 2021-11-23 |
| 11174552 | Rotary reactor for uniform particle coating with thin films | Colin C. Neikirk, Pravin K. Narwankar, Visweswaren Sivaramakrishnan, Jonathan Frankel, David Masayuki Ishikawa +2 more | 2021-11-16 |
| 11094577 | Apparatus and methods for wafer chucking on a susceptor for ALD | Joseph Yudovsky | 2021-08-17 |
| 10861736 | Apparatus and methods for wafer rotation in carousel susceptor | Joseph Yudovsky | 2020-12-08 |
| 10774006 | Microwave and induction heat treatment of ceramic coatings | Jennifer Y. Sun | 2020-09-15 |
| 10766824 | Methods of minimizing particles on wafer from plasma spray coatings | Jennifer Y. Sun, Xiao-Ming He | 2020-09-08 |
| 10685864 | Contour pocket and hybrid susceptor for wafer uniformity | Kallol Bera, Joseph Yudovsky | 2020-06-16 |
| 10633740 | Methods for depositing coatings on aerospace components | Yuriy Melnik, Sukti Chatterjee, Jonathan Frankel, Lance A. Scudder, Pravin K. Narwankar +4 more | 2020-04-28 |
| 10501844 | Fine leveling of large carousel based susceptor | — | 2019-12-10 |
| 10351956 | Integrated two-axis lift-rotation motor center pedestal in multi-wafer carousel ALD | Joseph Yudovsky | 2019-07-16 |
| 10312120 | Position and temperature monitoring of ALD platen susceptor | Abraham Ravid, Kevin Griffin, Joseph Yudovsky, Dmitry A. Dzilno, Alex Minkovich | 2019-06-04 |
| 10262888 | Apparatus and methods for wafer rotation in carousel susceptor | Joseph Yudovsky | 2019-04-16 |
| 10121655 | Lateral plasma/radical source | Anantha K. Subramani, Abhishek Chowdhury, John C. Forster, Nattaworn Nuntaworanuch, Kallol Bera +2 more | 2018-11-06 |