Issued Patents All Time
Showing 25 most recent of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12408239 | PBN heaters for ALD temperature uniformity | Kenneth Brian Doering, Gregory J. Wilson, Karthik Ramanathan, Mario D. Silvetti | 2025-09-02 |
| 12340980 | Plasma showerhead with improved uniformity | Chaowei Wang, Kenneth Brian Doering, Hanhong Chen, Kartik Shah, Hao Zhang | 2025-06-24 |
| 12084771 | Control of liquid delivery in auto-refill systems | Zohreh Razavi Hesabi, Cong Trinh, Alexander V. Garachtchenko, Kenric Choi, Vipin Jose +3 more | 2024-09-10 |
| 11976363 | Purge ring for pedestal assembly | Muhannad Mustafa, Mario D. Silvetti | 2024-05-07 |
| 11887856 | Enhanced spatial ALD of metals through controlled precursor mixing | Kelvin Chan, Yihong Chen, Jared Ahmad Lee, Srinivas Gandikota, Joseph Yudovsky +1 more | 2024-01-30 |
| 11821083 | Gas separation control in spatial atomic layer deposition | Ning Li, Steven Marcus, Tai T. Ngo | 2023-11-21 |
| 11761083 | Methods for controlling a flow pulse shape | Joseph AuBuchon, Hanhong Chen | 2023-09-19 |
| 11713508 | Apparatus and methods for improving chemical utilization rate in deposition process | Sanjeev Baluja, Joseph AuBuchon, Mario D. Silvetti, Hari Ponnekanti | 2023-08-01 |
| 11586789 | Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity | Dhritiman Subha Kashyap, Chaowei Wang, Kartik Shah, Karthik Ramanathan, Hanhong Chen +2 more | 2023-02-21 |
| 11584992 | Gas distribution assembly for improved pump-purge and precursor delivery | Kenneth Brian Doering, Mario David Silvetti | 2023-02-21 |
| 11577946 | Fail-safe pneumatic lift system | Abhishek Chowdhury, Kenneth Brian Doering, Santhoshkumar Doddegowdanapalya Nanjundegowda, Somashekhar Kosthi, Abhijit Ghosh | 2023-02-14 |
| 11530480 | Injector for batch processing and methods of use | Joseph Yudovsky, Mandyam Sriram | 2022-12-20 |
| 11430680 | Position and temperature monitoring of ALD platen susceptor | Abraham Ravid, Joseph Yudovsky, Kaushal Gangakhedkar, Dmitry A. Dzilno, Alex Minkovich | 2022-08-30 |
| 11396703 | Apparatus and methods for improving chemical utilization rate in deposition process | Sanjeev Baluja, Joseph AuBuchon, Mario David Silvetti, Hari Ponnekanti | 2022-07-26 |
| 11332828 | Gas distribution assembly mounting for fragile plates to prevent breakage | Guangwei Sun | 2022-05-17 |
| 11261525 | Injector for batch processing and methods of use | Joseph Yudovsky, Mandyam Sriram | 2022-03-01 |
| 11230763 | Gas separation control in spatial atomic layer deposition | Ning Li, Steven Marcus, Tai T. Ngo | 2022-01-25 |
| 11174553 | Gas distribution assembly for improved pump-purge and precursor delivery | Kenneth Brian Doering, Mario David Silvetti | 2021-11-16 |
| 11043386 | Enhanced spatial ALD of metals through controlled precursor mixing | Kelvin Chan, Yihong Chen, Jared Ahmad Lee, Srinivas Gandikota, Joseph Yudovsky +1 more | 2021-06-22 |
| 10900125 | Apparatus for susceptor temperature verification and methods of use | Joseph Yudovsky | 2021-01-26 |
| 10570511 | Gas separation control in spatial atomic layer deposition | Ning Li, Steven Marcus, Tai T. Ngo | 2020-02-25 |
| 10508340 | Atmospheric lid with rigid plate for carousel processing chambers | Joseph Yudovsky | 2019-12-17 |
| 10312120 | Position and temperature monitoring of ALD platen susceptor | Abraham Ravid, Joseph Yudovsky, Kaushal Gangakhedkar, Dmitry A. Dzilno, Alex Minkovich | 2019-06-04 |
| 10273578 | Top lamp module for carousel deposition chamber | Joseph Yudovsky, Robert T. Trujillo, Garry K. Kwong, Kallol Bera, Li-Qun Xia +1 more | 2019-04-30 |
| 10216012 | Wearable accessory with an inner chamber | Timothy R. Dexter | 2019-02-26 |