Issued Patents All Time
Showing 1–25 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12001193 | Apparatus for environmental control of dies and substrates for hybrid bonding | Ying Wang, Xundong Dai, Guan Huei See, Ruiping Wang, Michael R. Rice +1 more | 2024-06-04 |
| 11948783 | Dynamic phased array plasma source for complete plasma coverage of a moving substrate | Mukund Srinivasan | 2024-04-02 |
| 11923172 | Paired dynamic parallel plate capacitively coupled plasmas | Tsutomu Tanaka, Mandyam Sriram, Dmitry A. Dzilno, Sanjeev Baluja, Mario David Silvetti | 2024-03-05 |
| 11713508 | Apparatus and methods for improving chemical utilization rate in deposition process | Kevin Griffin, Sanjeev Baluja, Joseph AuBuchon, Mario D. Silvetti | 2023-08-01 |
| 11631583 | RF power source operation in plasma enhanced processes | Farhad Moghadam, Dmitry A. Dzilno | 2023-04-18 |
| 11396703 | Apparatus and methods for improving chemical utilization rate in deposition process | Kevin Griffin, Sanjeev Baluja, Joseph AuBuchon, Mario David Silvetti | 2022-07-26 |
| 11282676 | Paired dynamic parallel plate capacitively coupled plasmas | Tsutomu Tanaka, Mandyam Sriram, Dmitry A. Dzilno, Sanjeev Baluja, Mario David Silvetti | 2022-03-22 |
| 11031262 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2021-06-08 |
| 10854432 | Rotary plasma electrical feedthrough | — | 2020-12-01 |
| 10734265 | Semiconductor process equipment | Karthik Janakiraman, Juan Carlos Rocha, Mukund Srinivasan | 2020-08-04 |
| 10636684 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2020-04-28 |
| 10597785 | Single oxide metal deposition chamber | Anantha K. Subramani, Praburam Gopalraja, Tza-Jing Gung, Philip Allan Kraus | 2020-03-24 |
| 10577689 | Sputtering showerhead | Anantha K. Subramani, Tza-Jing Gung, Praburam Gopalraja | 2020-03-03 |
| 10518418 | Wafer swapper | Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Karthik Janakiraman, Sanjeev Baluja, Prajeeth Wilton | 2019-12-31 |
| 10483141 | Semiconductor process equipment | Karthik Janakiraman, Juan Carlos Rocha-Alvarez | 2019-11-19 |
| 10435787 | Hydrogen partial pressure control in a vacuum process chamber | James L'HEUREUX | 2019-10-08 |
| 10403535 | Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system | Zheng John Ye, Jay D. Pinson, II, Hiroji Hanawa, Jianhua Zhou, Xing Lin +11 more | 2019-09-03 |
| 10403515 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2019-09-03 |
| 10388549 | On-board metrology (OBM) design and implication in process tool | Khokan Chandra Paul, Jay D. Pinson, II, Juan Carlos Rocha-Alvarez, Rupankar Choudhury, Shekhar ATHANI +2 more | 2019-08-20 |
| 10236197 | Processing system containing an isolation region separating a deposition chamber from a treatment chamber | Karthik Janakiraman, Abhijit Basu Mallick, Mandyam Sriram, Alexandros T. Demos, Mukund Srinivasan +2 more | 2019-03-19 |
| 10056279 | Semiconductor process equipment | Karthik Janakiraman, Juan Carlos Rocha, Mukund Srinivasan | 2018-08-21 |
| 9889567 | Wafer swapper | Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Karthik Janakiraman, Sanjeev Baluja, Prajeeth Wilton | 2018-02-13 |
| 9040409 | Methods of forming solar cells and solar cell modules | Prabhat Kumar, Michael P. Stewart, Kalyan Venkata Chalapathi Rapolu, Lin Zhang | 2015-05-26 |
| 8900427 | Homing device for magnetron rotating on two arms | Keith A. Miller, Michael Allen Flanigan | 2014-12-02 |
| 8859324 | Methods of manufacturing solar cell devices | Michael P. Stewart, Prabhat Kumar, Kapila Wijekoon, Lin Zhang | 2014-10-14 |