Issued Patents All Time
Showing 26–47 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8390980 | Electrostatic chuck assembly | Steven V. Sansoni, Cheng-Hsiung Tsai, Shambhu N. Roy, Karl M. Brown, Vijay D. Parkhe | 2013-03-05 |
| 8129212 | Surface cleaning and texturing process for crystalline solar cells | Kapila Wijekoon, Rohit Mishra, Michael P. Stewart, Timothy Weidman, Tristan R. Holtam | 2012-03-06 |
| 8021527 | Coaxial shafts for radial positioning of rotating magnetron | Keith A. Miller, Michael Allen Flanigan | 2011-09-20 |
| 7655092 | Tandem process chamber | Kevin Fairbairn, Jessica E. Barzilai, W. N. (Nick) Taylor | 2010-02-02 |
| 7049606 | Electron beam treatment apparatus | Alexandros T. Demos, Jun Zhao, Helen R. Armer | 2006-05-23 |
| 6831284 | Large area source for uniform electron beam generation | Alexandros T. Demos, Jun Zhao, Helen R. Armer, William R. Livesay, Scott C. Woods | 2004-12-14 |
| 6645303 | Heater/lift assembly for high temperature processing chamber | Jonathan Frankel, Inna Shmurun, Visweswaren Sivaramakrishnan | 2003-11-11 |
| 6635115 | Tandem process chamber | Kevin Fairbairn, Jessica E. Barzilai, W. N. (Nick) Taylor | 2003-10-21 |
| 6361707 | Apparatus and methods for upgraded substrate processing system with microwave plasma source | Tsutomu Tanaka, Mukul Kelkar, Kevin Fairbairn, David Cheung | 2002-03-26 |
| 6354241 | Heated electrostatic particle trap for in-situ vacuum line cleaning of a substrated processing | Tsutomu Tanaka, Chau Nguyen, Kevin Fairbairn, Sebastien Raoux, Mark Fodor | 2002-03-12 |
| 6230652 | Apparatus and methods for upgraded substrate processing system with microwave plasma source | Tsutomu Tanaka, Mukul Kelkar, Kevin Fairbairn, David Cheung | 2001-05-15 |
| 6163007 | Microwave plasma generating apparatus with improved heat protection of sealing O-rings | Tsutomu Tanaka, Thomas Nowak, Chau Nguyen, Kevin Fairbairn | 2000-12-19 |
| 6152070 | Tandem process chamber | Kevin Fairbairn, Jessica E. Barzilai, W. N. (Nick) Taylor | 2000-11-28 |
| 6082950 | Front end wafer staging with wafer cassette turntables and on-the-fly wafer center finding | Allen Altwood, Kelly Colborne, Kevin Fairbairn, Christopher T. Lane, Satish Sundar | 2000-07-04 |
| 6077157 | Process chamber exhaust system | Kevin Fairbairn | 2000-06-20 |
| 6045618 | Microwave apparatus for in-situ vacuum line cleaning for substrate processing equipment | Sebastien Raoux, Tsutomu Tanaka, Mukul Kelkar, Kevin Fairbairn, David Cheung | 2000-04-04 |
| 6039834 | Apparatus and methods for upgraded substrate processing system with microwave plasma source | Tsutomu Tanaka, Mukul Kelkar, Kevin Fairbairn, David Cheung | 2000-03-21 |
| 5911834 | Gas delivery system | Kevin Fairbairn, David Cheung | 1999-06-15 |
| 5855681 | Ultra high throughput wafer vacuum processing system | Dan Maydan, Sasson Somekh, Ashok Sinha, Kevin Fairbairn, Christopher T. Lane +2 more | 1999-01-05 |
| 5844195 | Remote plasma source | Kevin Fairbairn, David Cheung, Tsutomu Tanaka, Malcal Kelka | 1998-12-01 |
| 5293870 | Method and apparatus for elastographic measurement and imaging | Jonathan Ophir, Ignacio Cespedes | 1994-03-15 |
| 5178147 | Method and apparatus for elastographic measurement and imaging | Jonathan Ophir, Ignacio Cespedes | 1993-01-12 |