Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11932950 | Organic contamination free surface machining | Yuanhong Guo, Sheng Guo, Marek Radko, Nagendra Madiwal, Matvey Farber +7 more | 2024-03-19 |
| 11887878 | Detachable biasable electrostatic chuck for high temperature applications | Shreesha Yogish Rao, Mukund Sundararajan, Cheng-Hsiung Tsai, Manjunatha Koppa | 2024-01-30 |
| 11555250 | Organic contamination free surface machining | Yuanhong Guo, Sheng Guo, Marek Radko, Nagendra Madiwal, Matvey Farber +7 more | 2023-01-17 |
| 11414740 | Processing system for forming layers | Alexander Lerner, Roey Shaviv, Michael P. Karazim, Kevin Moraes, Andrew J. Constant +4 more | 2022-08-16 |
| D960216 | Base plate for a processing chamber substrate support | Shreesha Yogish Rao, Mukund Sundararajan, Cheng-Hsiung Tsai, Manjunatha Koppa | 2022-08-09 |
| 11348823 | Compliant robot blade for substrate support and transfer | Jeffrey A. Brodine, Glen T. Mori | 2022-05-31 |
| D947914 | Base plate for a processing chamber substrate support | Shreesha Yogish Rao, Mukund Sundararajan, Cheng-Hsiung Tsai, Manjunatha Koppa | 2022-04-05 |
| D942516 | Process shield for a substrate processing chamber | Manjunatha Koppa, Aravind Kamath, Cheng-Hsiung Tsai, Manjunath H. Venkataswamappa, David T. Or | 2022-02-01 |
| 11170982 | Methods and apparatus for producing low angle depositions | Anantha K. Subramani, Praburam Gopal Raja, John C. Forster, Philip Allan Kraus, Yang Guo +5 more | 2021-11-09 |
| D933725 | Deposition ring for a substrate processing chamber | Manjunatha Koppa, Aravind Kamath, Cheng-Hsiung Tsai, Manjunath H. Venkataswamappa, David T. Or | 2021-10-19 |
| 11047039 | Substrate carrier having hard mask | Alexander Lerner, Kim Vellore, Ami Sade, Andrew J. Constant, Kevin Moraes +4 more | 2021-06-29 |
| D893441 | Base plate for a processing chamber substrate support | Shreesha Yogish Rao, Mukund Sundararajan, Cheng-Hsiung Tsai, Manjunatha Koppa | 2020-08-18 |
| D891382 | Process shield for a substrate processing chamber | Manjunatha Koppa, Aravind Kamath, Cheng-Hsiung Tsai, Manjunath H. Venkataswamappa, David T. Or | 2020-07-28 |
| 10704147 | Process kit design for in-chamber heater and wafer rotating mechanism | Muhammad M. Rasheed, Muhannad Mustafa, Hamid Tavassoli, Cheng-Hsiung Tsai, Vikash Banthia | 2020-07-07 |
| 10431489 | Substrate support apparatus having reduced substrate particle generation | Pulkit Agarwal, Song-Moon Suh, Glen T. Mori | 2019-10-01 |
| 10312127 | Compliant robot blade for defect reduction | Jeffrey A. Brodine, Glen T. Mori | 2019-06-04 |
| 10312116 | Methods and apparatus for rapidly cooling a substrate | Jallepally Ravi, Kirankumar Neelasandra SAVANDAIAH | 2019-06-04 |
| 9779971 | Methods and apparatus for rapidly cooling a substrate | Jallepally Ravi, Kirankumar Neelasandra SAVANDAIAH | 2017-10-03 |
| 9773692 | In-situ removable electrostatic chuck | Michael S. Cox, Lara Hawrylchak | 2017-09-26 |
| 9608549 | Electrostatic chuck | Vijay D. Parkhe, Cheng-Hsiung Tsai | 2017-03-28 |
| 9508584 | In-situ removable electrostatic chuck | Michael S. Cox, Lara Hawrylchak | 2016-11-29 |
| 9425076 | Substrate transfer robot end effector | Pulkit Agarwal, Daniel Greenberg, Song-Moon Suh, Jeffrey A. Brodine, Glen T. Mori | 2016-08-23 |
| 9147592 | Linked vacuum processing tools and methods of using the same | Eric A. Englhardt, Steve Szudarski, Andrew Scott Cornelius, Amitabh Puri, Michael R. Rice +5 more | 2015-09-29 |
| 8971009 | Electrostatic chuck with temperature control | Vijay D. Parkhe, Cheng-Hsiung Tsai | 2015-03-03 |
| 8559159 | Electrostatic chuck and methods of use thereof | Shambhu N. Roy, Martin Lee Riker, Keith A. Miller, Vijay D. Parkhe | 2013-10-15 |