Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142500 | Side storage pods, equipment front end modules, and methods for processing substrates | Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Dean C. Hruzek, Michael R. Rice | 2024-11-12 |
| 11637004 | Alignment module with a cleaning chamber | Alexander Lerner, Michael P. Karazim, Andrew J. Constant, Kim Vellore, Kevin Moraes +1 more | 2023-04-25 |
| 11621182 | Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing | Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Dean C. Hruzek, Michael R. Rice | 2023-04-04 |
| 11538706 | System and method for aligning a mask with a substrate | Alexander Lerner, Michael P. Karazim, Andrew J. Constant, Kim Vellore, Kevin Moraes +1 more | 2022-12-27 |
| 11414740 | Processing system for forming layers | Alexander Lerner, Roey Shaviv, Michael P. Karazim, Kevin Moraes, Steven V. Sansoni +4 more | 2022-08-16 |
| 11348823 | Compliant robot blade for substrate support and transfer | Steven V. Sansoni, Glen T. Mori | 2022-05-31 |
| 11047039 | Substrate carrier having hard mask | Alexander Lerner, Kim Vellore, Ami Sade, Steven V. Sansoni, Andrew J. Constant +4 more | 2021-06-29 |
| 10847390 | Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing | Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Dean C. Hruzek, Michael R. Rice | 2020-11-24 |
| 10388547 | Side storage pods, equipment front end modules, and methods for processing substrates | Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Dean C. Hruzek, Michael R. Rice | 2019-08-20 |
| 10312127 | Compliant robot blade for defect reduction | Steven V. Sansoni, Glen T. Mori | 2019-06-04 |
| 9443752 | High temperature anti-droop end effector for substrate transfer | Domingo J. Guerra, Whitney B. Kroetz | 2016-09-13 |
| 9425076 | Substrate transfer robot end effector | Pulkit Agarwal, Daniel Greenberg, Song-Moon Suh, Steven V. Sansoni, Glen T. Mori | 2016-08-23 |
| 9325228 | Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing | Jeffrey C. Hudgens, Izya Kremerman, Damon K. Cox | 2016-04-26 |
| 9076829 | Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing | Jeffrey C. Hudgens, Izya Kremerman | 2015-07-07 |
| 9033644 | Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems with web extending from hub | Jeffrey C. Hudgens, Izya Kremerman | 2015-05-19 |
| 8599531 | Electrostatic end effector apparatus, systems and methods | Satish Sundar, Jeffrey C. Hudgens, Prudhvi R. Chintalapati, William Taylor, William P. Laceky +2 more | 2013-12-03 |
| 8061232 | Methods and apparatus for a robot wrist assembly | Whitney B. Kroetz, Damon K. Cox, Domingo J. Guerra | 2011-11-22 |
| 8016542 | Methods and apparatus for extending the reach of a dual scara robot linkage | Damon K. Cox, Marvin L. Freeman, Jason M. Schaller, Jeffrey C. Hudgens | 2011-09-13 |
| 7927062 | Methods and apparatus for transferring substrates during electronic device manufacturing | Michael R. Rice, Nicholas Cravalho | 2011-04-19 |
| 6413037 | Flexibly mounted contact cup | — | 2002-07-02 |
| 6034863 | Apparatus for retaining a workpiece in a process chamber within a semiconductor wafer processing system | Dan Marohl, Tony P. Schiavo, Jr. | 2000-03-07 |