| 12142500 |
Side storage pods, equipment front end modules, and methods for processing substrates |
Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Dean C. Hruzek, Michael R. Rice |
2024-11-12 |
| 11637004 |
Alignment module with a cleaning chamber |
Alexander Lerner, Michael P. Karazim, Andrew J. Constant, Kim Vellore, Kevin Moraes +1 more |
2023-04-25 |
| 11621182 |
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing |
Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Dean C. Hruzek, Michael R. Rice |
2023-04-04 |
| 11538706 |
System and method for aligning a mask with a substrate |
Alexander Lerner, Michael P. Karazim, Andrew J. Constant, Kim Vellore, Kevin Moraes +1 more |
2022-12-27 |
| 11414740 |
Processing system for forming layers |
Alexander Lerner, Roey Shaviv, Michael P. Karazim, Kevin Moraes, Steven V. Sansoni +4 more |
2022-08-16 |
| 11348823 |
Compliant robot blade for substrate support and transfer |
Steven V. Sansoni, Glen T. Mori |
2022-05-31 |
| 11047039 |
Substrate carrier having hard mask |
Alexander Lerner, Kim Vellore, Ami Sade, Steven V. Sansoni, Andrew J. Constant +4 more |
2021-06-29 |
| 10847390 |
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing |
Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Dean C. Hruzek, Michael R. Rice |
2020-11-24 |
| 10388547 |
Side storage pods, equipment front end modules, and methods for processing substrates |
Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Dean C. Hruzek, Michael R. Rice |
2019-08-20 |
| 10312127 |
Compliant robot blade for defect reduction |
Steven V. Sansoni, Glen T. Mori |
2019-06-04 |
| 9443752 |
High temperature anti-droop end effector for substrate transfer |
Domingo J. Guerra, Whitney B. Kroetz |
2016-09-13 |
| 9425076 |
Substrate transfer robot end effector |
Pulkit Agarwal, Daniel Greenberg, Song-Moon Suh, Steven V. Sansoni, Glen T. Mori |
2016-08-23 |
| 9325228 |
Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing |
Jeffrey C. Hudgens, Izya Kremerman, Damon K. Cox |
2016-04-26 |
| 9076829 |
Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing |
Jeffrey C. Hudgens, Izya Kremerman |
2015-07-07 |
| 9033644 |
Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems with web extending from hub |
Jeffrey C. Hudgens, Izya Kremerman |
2015-05-19 |
| 8599531 |
Electrostatic end effector apparatus, systems and methods |
Satish Sundar, Jeffrey C. Hudgens, Prudhvi R. Chintalapati, William Taylor, William P. Laceky +2 more |
2013-12-03 |
| 8061232 |
Methods and apparatus for a robot wrist assembly |
Whitney B. Kroetz, Damon K. Cox, Domingo J. Guerra |
2011-11-22 |
| 8016542 |
Methods and apparatus for extending the reach of a dual scara robot linkage |
Damon K. Cox, Marvin L. Freeman, Jason M. Schaller, Jeffrey C. Hudgens |
2011-09-13 |
| 7927062 |
Methods and apparatus for transferring substrates during electronic device manufacturing |
Michael R. Rice, Nicholas Cravalho |
2011-04-19 |
| 6413037 |
Flexibly mounted contact cup |
— |
2002-07-02 |
| 6034863 |
Apparatus for retaining a workpiece in a process chamber within a semiconductor wafer processing system |
Dan Marohl, Tony P. Schiavo, Jr. |
2000-03-07 |
