Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11253994 | Dual arm robot | — | 2022-02-22 |
| 10758045 | Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods | Eran Weiss, Travis Morey, Nir Merry, Paul B. Reuter, Jeffrey C. Hudgens +1 more | 2020-09-01 |
| 10278501 | Load lock door assembly, load lock apparatus, electronic device processing systems, and methods | Eran Weiss, Travis Morey, Nir Merry, Paul B. Reuter, Jeffrey C. Hudgens +1 more | 2019-05-07 |
| 10029363 | Dual arm robot | — | 2018-07-24 |
| 9742250 | Motor modules, multi-axis motor drive assemblies, multi-axis robot apparatus, and electronic device manufacturing systems and methods | — | 2017-08-22 |
| 9724834 | Robot apparatus, drive assemblies, and methods for transporting substrates in electronic device manufacturing | — | 2017-08-08 |
| 9530623 | Process chamber apparatus, systems, and methods for controlling a gas flow pattern | Nir Merry, Chandrakant M. Sapkale, Jeffrey C. Hudgens | 2016-12-27 |
| 9457464 | Substrate processing systems and robot apparatus for transporting substrates in electronic device manufacturing | Jeffrey C. Hudgens | 2016-10-04 |
| 9405287 | Apparatus and method for optical calibration of wafer placement by a robot | Abraham Ravid, Todd Egan, Eran Weiss, Michael R. Rice | 2016-08-02 |
| 9334127 | Systems, apparatus and methods for transporting substrates in electronic device manufacturing | Jeffrey C. Hudgens | 2016-05-10 |
| 9325228 | Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing | Jeffrey C. Hudgens, Jeffrey A. Brodine, Damon K. Cox | 2016-04-26 |
| 9117865 | Robot systems, apparatus, and methods having independently rotatable waists | Jeffrey C. Hudgens | 2015-08-25 |
| 9076829 | Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing | Jeffrey A. Brodine, Jeffrey C. Hudgens | 2015-07-07 |
| 9076830 | Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm | Jeffrey C. Hudgens, Damon K. Cox | 2015-07-07 |
| 9033644 | Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems with web extending from hub | Jeffrey C. Hudgens, Jeffrey A. Brodine | 2015-05-19 |
| 8951002 | Dual arm robot | — | 2015-02-10 |
| 8784033 | Robot systems, apparatus and methods for transporting substrates | Jeffrey C. Hudgens | 2014-07-22 |
| 8777547 | Systems, apparatus and methods for transporting substrates | Jeffrey C. Hudgens | 2014-07-15 |
| 8768513 | Systems having multi-linkage robots and methods to correct positional and rotational alignment in multi-linkage robots | Damon K. Cox | 2014-07-01 |
| 8692500 | Systems, apparatus and methods for making an electrical connection to a robot | William P. Laceky | 2014-04-08 |
| 8398355 | Linearly distributed semiconductor workpiece processing tool | William H. Holtkamp, Christopher Hofmeister, Richard J. Pickreign | 2013-03-19 |
| 8264187 | Systems, apparatus and methods for making an electrical connection | William P. Laceky | 2012-09-11 |
| 7891935 | Dual arm robot | — | 2011-02-22 |
| 5064340 | Precision arm mechanism | Genco Genov, Lubomir Skrobak, Grzegorz Kielczewski | 1991-11-12 |