Issued Patents All Time
Showing 25 most recent of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12235144 | Micro-electromechanical device for use in a flow control apparatus | Ming Xu | 2025-02-25 |
| 11996307 | Semiconductor processing tool platform configuration with reduced footprint | Schubert S. Chu, Sushant S. Koshti, Michael Kuchar, Nyi O. Myo, Songjae Lee | 2024-05-28 |
| 11772958 | Mass flow control based on micro-electromechanical devices | Paul Z. Wirth, Ming Xu, Sushant S. Koshti, Raechel Chu-Hui Tan | 2023-10-03 |
| 11749540 | Dual actuating tilting slit valve | Jeff Hudgens | 2023-09-05 |
| 11749537 | Side storage pods, equipment front end modules, and methods for operating equipment front end modules | Patrick D. Pannese, Murali Narasimhan, Paul B. Reuter | 2023-09-05 |
| 11640915 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Paul B. Reuter, Dean C. Hruzek, John C. Menk, Douglas B. Baumgarten | 2023-05-02 |
| 11610794 | Side storage pods, equipment front end modules, and methods for operating the same | Paul B. Reuter, Dean C. Hruzek, John C. Menk, Douglas B. Baumgarten | 2023-03-21 |
| 11450539 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee +3 more | 2022-09-20 |
| 11373891 | Front-ducted equipment front end modules, side storage pods, and methods of operating the same | Paul B. Reuter, Robin C. Armstrong, John C. Menk | 2022-06-28 |
| 11294164 | Integrated system and method | Igor Krivts (Krayvitz), Yoram Uziel, Albert Mariasin, Rami Elichai, Zvi Goren | 2022-04-05 |
| 11282724 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee +3 more | 2022-03-22 |
| 11244844 | High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods | Paul B. Reuter, Murali Narasimhan, Amulya L. Athayde, Patrick D. Pannese, Dean C. Hruzek | 2022-02-08 |
| 11244846 | Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing | Jeffrey C. Hudgens, Michael R. Rice, Karuppasamy Muthukamatchi | 2022-02-08 |
| 11189511 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Paul B. Reuter, Dean C. Hruzek, John C. Menk, Douglas B. Baumgarten | 2021-11-30 |
| 10943805 | Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing | Jeffrey C. Hudgens, Michael R. Rice, Karuppasamy Muthukamatchi | 2021-03-09 |
| 10847391 | Semiconductor device manufacturing platform with single and twinned processing chambers | Michael R. Rice, Sushant S. Koshti, Jeffrey C. Hudgens | 2020-11-24 |
| 10758045 | Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods | Eran Weiss, Travis Morey, Paul B. Reuter, Izya Kremerman, Jeffrey C. Hudgens +1 more | 2020-09-01 |
| 10278501 | Load lock door assembly, load lock apparatus, electronic device processing systems, and methods | Eran Weiss, Travis Morey, Paul B. Reuter, Izya Kremerman, Jeffrey C. Hudgens +1 more | 2019-05-07 |
| 10234261 | Fast and continuous eddy-current metrology of a conductive film | Edward W. Budiarto, Dmitry A. Dzilno, Todd Egan, Jeffrey C. Hudgens | 2019-03-19 |
| 10196845 | Substrate carrier door assemblies, substrate carriers, and methods including magnetic door seal | John Mazzocco | 2019-02-05 |
| 10192765 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee +3 more | 2019-01-29 |
| 10112259 | Damage isolation by shaped beam delivery in laser scribing process | James M. Holden, Todd Egan | 2018-10-30 |
| 9698074 | Heated substrate support with temperature profile control | Leon Volfovski | 2017-07-04 |
| 9564349 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel +1 more | 2017-02-07 |
| 9530623 | Process chamber apparatus, systems, and methods for controlling a gas flow pattern | Chandrakant M. Sapkale, Izya Kremerman, Jeffrey C. Hudgens | 2016-12-27 |