| 12235144 |
Micro-electromechanical device for use in a flow control apparatus |
Ming Xu |
2025-02-25 |
|
| 11996307 |
Semiconductor processing tool platform configuration with reduced footprint |
Schubert S. Chu, Sushant S. Koshti, Michael Kuchar, Nyi O. Myo, Songjae Lee |
2024-05-28 |
$67,076,000 |
| 11772958 |
Mass flow control based on micro-electromechanical devices |
Paul Z. Wirth, Ming Xu, Sushant S. Koshti, Raechel Chu-Hui Tan |
2023-10-03 |
$34,462,000 |
| 11749540 |
Dual actuating tilting slit valve |
Jeff Hudgens |
2023-09-05 |
$42,922,000 |
| 11749537 |
Side storage pods, equipment front end modules, and methods for operating equipment front end modules |
Patrick D. Pannese, Murali Narasimhan, Paul B. Reuter |
2023-09-05 |
$42,922,000 |
| 11640915 |
Side storage pods, equipment front end modules, and methods for operating EFEMs |
Paul B. Reuter, Dean C. Hruzek, John C. Menk, Douglas B. Baumgarten |
2023-05-02 |
$66,273,000 |
| 11610794 |
Side storage pods, equipment front end modules, and methods for operating the same |
Paul B. Reuter, Dean C. Hruzek, John C. Menk, Douglas B. Baumgarten |
2023-03-21 |
$36,722,000 |
| 11450539 |
Substrate processing systems, apparatus, and methods with factory interface environmental controls |
Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee +3 more |
2022-09-20 |
$25,949,000 |
| 11373891 |
Front-ducted equipment front end modules, side storage pods, and methods of operating the same |
Paul B. Reuter, Robin C. Armstrong, John C. Menk |
2022-06-28 |
$26,475,000 |
| 11294164 |
Integrated system and method |
Igor Krivts (Krayvitz), Yoram Uziel, Albert Mariasin, Rami Elichai, Zvi Goren |
2022-04-05 |
$91,536,000 |
| 11282724 |
Substrate processing systems, apparatus, and methods with factory interface environmental controls |
Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee +3 more |
2022-03-22 |
$64,102,000 |
| 11244844 |
High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods |
Paul B. Reuter, Murali Narasimhan, Amulya L. Athayde, Patrick D. Pannese, Dean C. Hruzek |
2022-02-08 |
$81,917,000 |
| 11244846 |
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing |
Jeffrey C. Hudgens, Michael R. Rice, Karuppasamy Muthukamatchi |
2022-02-08 |
$81,917,000 |
| 11189511 |
Side storage pods, equipment front end modules, and methods for operating EFEMs |
Paul B. Reuter, Dean C. Hruzek, John C. Menk, Douglas B. Baumgarten |
2021-11-30 |
$50,552,000 |
| 10943805 |
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing |
Jeffrey C. Hudgens, Michael R. Rice, Karuppasamy Muthukamatchi |
2021-03-09 |
$63,182,000 |
| 10847391 |
Semiconductor device manufacturing platform with single and twinned processing chambers |
Michael R. Rice, Sushant S. Koshti, Jeffrey C. Hudgens |
2020-11-24 |
$38,395,000 |
| 10758045 |
Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods |
Eran Weiss, Travis Morey, Paul B. Reuter, Izya Kremerman, Jeffrey C. Hudgens +1 more |
2020-09-01 |
$30,946,000 |
| 10278501 |
Load lock door assembly, load lock apparatus, electronic device processing systems, and methods |
Eran Weiss, Travis Morey, Paul B. Reuter, Izya Kremerman, Jeffrey C. Hudgens +1 more |
2019-05-07 |
$13,988,000 |
| 10234261 |
Fast and continuous eddy-current metrology of a conductive film |
Edward W. Budiarto, Dmitry A. Dzilno, Todd Egan, Jeffrey C. Hudgens |
2019-03-19 |
$17,059,000 |
| 10196845 |
Substrate carrier door assemblies, substrate carriers, and methods including magnetic door seal |
John Mazzocco |
2019-02-05 |
$20,569,000 |
| 10192765 |
Substrate processing systems, apparatus, and methods with factory interface environmental controls |
Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee +3 more |
2019-01-29 |
$20,450,000 |
| 10112259 |
Damage isolation by shaped beam delivery in laser scribing process |
James M. Holden, Todd Egan |
2018-10-30 |
$15,195,000 |
| 9698074 |
Heated substrate support with temperature profile control |
Leon Volfovski |
2017-07-04 |
|
| 9564349 |
Rapid thermal processing chamber with micro-positioning system |
Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel +1 more |
2017-02-07 |
$24,536,000 |
| 9530623 |
Process chamber apparatus, systems, and methods for controlling a gas flow pattern |
Chandrakant M. Sapkale, Izya Kremerman, Jeffrey C. Hudgens |
2016-12-27 |
$14,994,000 |
