Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211517 | Pressurized heated rolling press for manufacture and method of use | Steven YOSHIDA, Eric Sanford | 2021-12-28 |
| 10718051 | Methods for chemical vapor deposition (CVD) in a movable liner assembly | Gregg Higashi, Lori D. Washington | 2020-07-21 |
| 10076896 | Pressurized heated rolling press for manufacture and method of use | — | 2018-09-18 |
| 10066297 | Tiled showerhead for a semiconductor chemical vapor deposition reactor | Gregg Higashi, Alexander Lerner, Lori D. Washington, Andreas Hegedus | 2018-09-04 |
| 9982346 | Movable liner assembly for a deposition zone in a CVD reactor | Gregg Higashi, Lori D. Washington | 2018-05-29 |
| 9859162 | Perforation of films for separation | Daniel G. Patterson | 2018-01-02 |
| 9644268 | Thermal bridge for chemical vapor deposition reactors | Gregg Higashi, Andreas Hegedus | 2017-05-09 |
| 9564349 | Rapid thermal processing chamber with micro-positioning system | Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel, Alexander Lerner +1 more | 2017-02-07 |
| 9536728 | Lamp for rapid thermal processing chamber | Joseph M. Ranish | 2017-01-03 |
| 9390950 | Rapid thermal processing chamber with micro-positioning system | Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel, Alexander Lerner +1 more | 2016-07-12 |
| 9212422 | CVD reactor with gas flow virtual walls | Gregg Higashi, Alexander Lerner, Lori D. Washington | 2015-12-15 |
| 9209049 | Rapid conductive cooling using a secondary process plane | Alexander Lerner | 2015-12-08 |
| 9175393 | Tiled showerhead for a semiconductor chemical vapor deposition reactor | Gregg Higashi, Lori D. Washington, Andreas Hegedus | 2015-11-03 |
| 9169554 | Wafer carrier track | Gang He, Gregg Higashi, Roger Hamamjy, Andreas Hegedus | 2015-10-27 |
| 8985911 | Wafer carrier track | Gang He, Gregg Higashi, Roger Hamamjy, Andreas Hegedus | 2015-03-24 |
| 8900889 | Rapid thermal processing chamber with micro-positioning system | Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel, Alexander Lerner +1 more | 2014-12-02 |
| 8859042 | Methods for heating with lamps | Gang He, Gregg Higashi, Roger Hamamjy, Andreas Hegedus | 2014-10-14 |
| 8852696 | Method for vapor deposition | Gang He, Gregg Higashi, Roger Hamamjy, Andreas Hegedus | 2014-10-07 |
| 8698049 | Rapid thermal processing lamphead with improved cooling | Joseph M. Ranish, Kedarnath Sangam, Alexander Lerner | 2014-04-15 |
| 8658947 | Rapid conductive cooling using a secondary process plane | Alexander Lerner | 2014-02-25 |
| RE44712 | Lamp for rapid thermal processing chamber | Joseph M. Ranish | 2014-01-21 |
| 8602707 | Methods and apparatus for a chemical vapor deposition reactor | Gang He, Gregg Higashi, Roger Hamamjy, Andreas Hegedus, Melissa Archer +2 more | 2013-12-10 |
| 8490660 | Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber | Blake Koelmel, Alexander Lerner, Joseph M. Ranish, Kedarnath Sangam | 2013-07-23 |
| 8314371 | Rapid thermal processing chamber with micro-positioning system | Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel, Alexander Lerner +1 more | 2012-11-20 |
| 8294068 | Rapid thermal processing lamphead with improved cooling | Joseph M. Ranish, Kedarnath Sangam, Alexander Lerner | 2012-10-23 |