Issued Patents All Time
Showing 25 most recent of 117 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11945045 | Annealing apparatus using two wavelengths of radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more | 2024-04-02 |
| 11942381 | System for non radial temperature control for rotating substrates | Wolfgang Aderhold, Joseph M. Ranish | 2024-03-26 |
| 11495479 | Light pipe window structure for thermal chamber applications and processes | Joseph M. Ranish, Anzhong Chang | 2022-11-08 |
| 11292079 | Laser noise elimination in transmission thermometry | Jiping Li, Thomas Haw | 2022-04-05 |
| 10857623 | Annealing apparatus using two wavelengths of radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more | 2020-12-08 |
| 10840100 | Method of thermal processing structures formed on a substrate | Paul G. Carey, Dean Jennings, Abhilash J. Mayur, Stephen Moffatt, William Schaffer +2 more | 2020-11-17 |
| 10741457 | System for non radial temperature control for rotating substrates | Wolfgang Aderhold, Joseph M. Ranish | 2020-08-11 |
| 10741428 | Semiconductor processing chamber | Mehran Behdjat, Niraj Merchant, Douglas R. McAllister, Dongming Iu, Kong CHAN +1 more | 2020-08-11 |
| 10727093 | Light pipe window structure for low pressure thermal processes | Paul Brillhart, Joseph M. Ranish, Edric Tong, James Francis Mack, Kin Pong Lo +3 more | 2020-07-28 |
| 10699922 | Light pipe arrays for thermal chamber applications and thermal processes | Joseph M. Ranish | 2020-06-30 |
| 10537965 | Fiber array line generator | Douglas E. Holmgren, Samuel C. Howells, Theodore P. Moffitt, Diwakar Kedlaya | 2020-01-21 |
| 10421151 | Laser noise elimination in transmission thermometry | Jiping Li, Thomas Haw | 2019-09-24 |
| 10410890 | Light pipe window structure for thermal chamber applications and processes | Joseph M. Ranish, Anzhong Chang | 2019-09-10 |
| 10373859 | Support ring with masked edge | Mehran Behdjat, Norman L. Tam, Joseph M. Ranish, Koji Nakanishi, Toshiyuki Nakagawa | 2019-08-06 |
| 10345155 | Model based lamp background filtration of stray radiation for pyrometry | Kailash Kiran Patalay | 2019-07-09 |
| 10256005 | Rotating substrate laser anneal | Joseph M. Ranish, Shashank Sharma, Diwakar Kedlaya | 2019-04-09 |
| 10249522 | In-situ temperature measurement in a noisy environment | Hanbing Wu, Anantha K. Subramani, Wei Wang | 2019-04-02 |
| 10181409 | Thermal processing apparatus | Stephen Moffatt, Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Bruce E. Adams +1 more | 2019-01-15 |
| 10179354 | Optical endpoint detection system | Balasubramanian Ramachandran, Masato Ishii | 2019-01-15 |
| 10141191 | Method of thermal processing structures formed on a substrate | Paul G. Carey, Dean Jennings, Abhilash J. Mayur, Stephen Moffatt, William Schaffer +2 more | 2018-11-27 |
| 10128144 | Support cylinder for thermal processing chamber | Mehran Behdjat, Joseph M. Ranish, Norman L. Tam, Jeffrey Tobin, Jiping Li +1 more | 2018-11-13 |
| 10128197 | Bottom processing | Joseph M. Ranish, Swaminathan Srinivasan | 2018-11-13 |
| 10094618 | Ambient laminar gas flow distribution in laser processing systems | Stephen Moffatt | 2018-10-09 |
| 10074538 | Methods for crystallizing a substrate using a plurality of laser pulses and freeze periods | Bruce E. Adams, Stephen Moffatt | 2018-09-11 |
| 10056286 | Support ring with masked edge | Mehran Behdjat, Norman L. Tam, Joseph M. Ranish, Koji Nakanishi, Toshiyuki Nakagawa | 2018-08-21 |