Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10763141 | Non-contact temperature calibration tool for a substrate support and method of using the same | Lara Hawrylchak, Mehran Behdjat, Dietrich Gage, Christopher Dao, Binh Minh Nguyen +2 more | 2020-09-01 | $30,946,000 |
| 10741428 | Semiconductor processing chamber | Aaron Muir Hunter, Mehran Behdjat, Douglas R. McAllister, Dongming Iu, Kong CHAN +1 more | 2020-08-11 | $71,596,000 |