Issued Patents All Time
Showing 25 most recent of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354843 | Process chamber process kit with protective coating | Jian-Lin Wu, Wei Liu, Theresa Kramer Guarini, Linlin Wang, Malcolm J. Bevan | 2025-07-08 |
| 12341032 | Methods of selective oxidation on rapid thermal processing (RTP) chamber with active steam generation | Chaitanya A. PRASAD, Christopher S. Olsen, Erika HANSEN, Daniel C. Glover, Naman Apurva +1 more | 2025-06-24 |
| 12272531 | Dual pressure oxidation method for forming an oxide layer in a feature | Christopher S. Olsen, Rene George, Tsung-Han Yang, David Knapp | 2025-04-08 |
| 12139790 | Processing system and method of delivering a reactant gas | Vishwas Kumar Pandey, Christopher S. Olsen, Rene George, Eric Kihara Shono, Erika HANSEN +3 more | 2024-11-12 |
| 12125698 | Integrated epitaxy and preclean system | Schubert S. Chu, Tushar Mandrekar, Errol C. Sanchez, Kin Pong Lo | 2024-10-22 |
| 12110585 | Process chamber and exhaust liner system therefor | Naman Apurva, Mahesh Ramakrishna, Sriharish Srinivasan, Prashant Agarwal | 2024-10-08 |
| 11996305 | Selective oxidation on rapid thermal processing (RTP) chamber with active steam generation | Chaitanya A. PRASAD, Christopher S. Olsen, Erika HANSEN, Daniel C. Glover, Naman Apurva +1 more | 2024-05-28 |
| 11990321 | Fast response pedestal assembly for selective preclean | Chaitanya A. PRASAD | 2024-05-21 |
| 11959169 | Asymmetric injection for better wafer uniformity | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Kartik Shah, Hansel LO +3 more | 2024-04-16 |
| 11927482 | Methods for calibrating an optical emission spectrometer | Kin Pong Lo, Malcolm J. Bevan, Theresa Kramer Guarini, Wei Liu, Bernard L. Hwang | 2024-03-12 |
| 11615944 | Remote plasma oxidation chamber | Christopher S. Olsen, Eric Kihara Shono, Agus Sofian Tjandra, Chaitanya A. PRASAD, Sairaju Tallavarjula | 2023-03-28 |
| 11581408 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Canfeng Lai, Bernard L. Hwang, Jeffrey Tobin +2 more | 2023-02-14 |
| 11529592 | Gas injector with baffle | Vishwas Kumar Pandey, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen, Sairaju Tallavarjula +4 more | 2022-12-20 |
| 11515130 | Fast response pedestal assembly for selective preclean | Chaitanya A. PRASAD | 2022-11-29 |
| 11486038 | Asymmetric injection for better wafer uniformity | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Kartik Shah, Hansel LO +3 more | 2022-11-01 |
| 11348769 | Plasma-enhanced anneal chamber for wafer outgassing | Matthew D. Scotney-Castle, Norman L. Tam, Matthew Spuller, Kong CHAN, Dongming Iu +1 more | 2022-05-31 |
| 11268193 | Gas injection apparatus with heating channels | Agus Sofian Tjandra, Emre Cuvalci | 2022-03-08 |
| 11164737 | Integrated epitaxy and preclean system | Schubert S. Chu, Tushar Mandrekar, Errol C. Sanchez, Kin Pong Lo | 2021-11-02 |
| 11114289 | Non-disappearing anode for use with dielectric deposition | Michael S. Cox, Brian T. West | 2021-09-07 |
| 11081340 | Argon addition to remote plasma oxidation | Hansel LO, Christopher S. Olsen, Eric Kihara Shono, Johanes S. Swenberg, Erika HANSEN +1 more | 2021-08-03 |
| 11077410 | Gas injector with baffle | Vishwas Kumar Pandey, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen, Sairaju Tallavarjula +4 more | 2021-08-03 |
| 11049719 | Epitaxy system integrated with high selectivity oxide removal and high temperature contaminant removal | Kin Pong Lo, Errol C. Sanchez, Schubert S. Chu, Tushar Mandrekar | 2021-06-29 |
| 11004704 | Finned rotor cover | Chaitanya A. PRASAD, Emre Cuvalci | 2021-05-11 |
| 10971357 | Thin film treatment process | Wei Liu, Theresa Kramer Guarini, Linlin Wang, Malcolm J. Bevan, Johanes S. Swenberg +4 more | 2021-04-06 |
| 10950698 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Canfeng Lai, Bernard L. Hwang, Jeffrey Tobin +2 more | 2021-03-16 |