Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341032 | Methods of selective oxidation on rapid thermal processing (RTP) chamber with active steam generation | Chaitanya A. PRASAD, Christopher S. Olsen, Lara Hawrylchak, Erika HANSEN, Daniel C. Glover +1 more | 2025-06-24 |
| 12110585 | Process chamber and exhaust liner system therefor | Lara Hawrylchak, Mahesh Ramakrishna, Sriharish Srinivasan, Prashant Agarwal | 2024-10-08 |
| 11996305 | Selective oxidation on rapid thermal processing (RTP) chamber with active steam generation | Chaitanya A. PRASAD, Christopher S. Olsen, Lara Hawrylchak, Erika HANSEN, Daniel C. Glover +1 more | 2024-05-28 |
| D884855 | Heater pedestal | Mahesh Ramakrishna | 2020-05-19 |
| 10458861 | Non-contact temperature measurement by dual-wavelength shift in Brewster's angle | Theodore P. Moffitt | 2019-10-29 |