| 12341032 |
Methods of selective oxidation on rapid thermal processing (RTP) chamber with active steam generation |
Christopher S. Olsen, Lara Hawrylchak, Erika HANSEN, Daniel C. Glover, Naman Apurva +1 more |
2025-06-24 |
| 12165907 |
Apparatus for rotating substrates |
Giridhar Kamesh, Vinodh Ramachandran, Mohammad Aamir, Daniel C. Glover |
2024-12-10 |
| 11996305 |
Selective oxidation on rapid thermal processing (RTP) chamber with active steam generation |
Christopher S. Olsen, Lara Hawrylchak, Erika HANSEN, Daniel C. Glover, Naman Apurva +1 more |
2024-05-28 |
| 11990321 |
Fast response pedestal assembly for selective preclean |
Lara Hawrylchak |
2024-05-21 |
| 11615944 |
Remote plasma oxidation chamber |
Christopher S. Olsen, Eric Kihara Shono, Lara Hawrylchak, Agus Sofian Tjandra, Sairaju Tallavarjula |
2023-03-28 |
| 11562915 |
Methods, systems, and apparatus for optically monitoring individual lamps |
Ji-Dih HU, Dongming Iu, Samuel C. Howells, Vilen K. NESTOROV |
2023-01-24 |
| 11515130 |
Fast response pedestal assembly for selective preclean |
Lara Hawrylchak |
2022-11-29 |
| 11004704 |
Finned rotor cover |
Lara Hawrylchak, Emre Cuvalci |
2021-05-11 |
| 10626500 |
Showerhead design |
Kartik Shah, Kevin Joseph Bautista, Jeffrey Tobin, Umesh M. Kelkar, Lara Hawrylchak |
2020-04-21 |
| 10221483 |
Showerhead design |
Kartik Shah, Kevin Joseph Bautista, Jeffrey Tobin, Umesh M. Kelkar, Lara Hawrylchak |
2019-03-05 |
