| 12139790 |
Processing system and method of delivering a reactant gas |
Vishwas Kumar Pandey, Christopher S. Olsen, Rene George, Lara Hawrylchak, Erika HANSEN +3 more |
2024-11-12 |
| D1023987 |
Chamber inlet |
Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more |
2024-04-23 |
| 11959169 |
Asymmetric injection for better wafer uniformity |
Vishwas Kumar Pandey, Christopher S. Olsen, Kartik Shah, Hansel LO, Tobin Kaufman-Osborn +3 more |
2024-04-16 |
| 11885021 |
Gas supply member with baffle |
Kartik Shah, Vishwas Kumar Pandey, Kailash Pradhan, Sairaju Tallavarjula, Rene George +2 more |
2024-01-30 |
| 11732355 |
Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber |
Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Tobin Kaufman-Osborn +2 more |
2023-08-22 |
| 11634813 |
Half-angle nozzle |
— |
2023-04-25 |
| 11615944 |
Remote plasma oxidation chamber |
Christopher S. Olsen, Lara Hawrylchak, Agus Sofian Tjandra, Chaitanya A. PRASAD, Sairaju Tallavarjula |
2023-03-28 |
| 11529592 |
Gas injector with baffle |
Vishwas Kumar Pandey, Lara Hawrylchak, Kartik Shah, Christopher S. Olsen, Sairaju Tallavarjula +4 more |
2022-12-20 |
| 11501945 |
Side inject designs for improved radical concentrations |
Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more |
2022-11-15 |
| 11501954 |
Dogbone inlet cone profile for remote plasma oxidation chamber |
Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Hansel LO +1 more |
2022-11-15 |
| 11486038 |
Asymmetric injection for better wafer uniformity |
Vishwas Kumar Pandey, Christopher S. Olsen, Kartik Shah, Hansel LO, Tobin Kaufman-Osborn +3 more |
2022-11-01 |
| 11220746 |
Half-angle nozzle |
— |
2022-01-11 |
| 11124878 |
Gas supply member with baffle |
Kartik Shah, Vishwas Kumar Pandey, Kailash Pradhan, Sairaju Tallavarjula, Rene George +2 more |
2021-09-21 |
| 11077410 |
Gas injector with baffle |
Vishwas Kumar Pandey, Lara Hawrylchak, Kartik Shah, Christopher S. Olsen, Sairaju Tallavarjula +4 more |
2021-08-03 |
| 11081340 |
Argon addition to remote plasma oxidation |
Hansel LO, Christopher S. Olsen, Johanes S. Swenberg, Erika HANSEN, Taewan Kim +1 more |
2021-08-03 |
| D924825 |
Chamber inlet |
Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more |
2021-07-13 |
| 11049696 |
Dogbone inlet cone profile for remote plasma oxidation chamber |
Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Hansel LO +1 more |
2021-06-29 |
| 10847337 |
Side inject designs for improved radical concentrations |
Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more |
2020-11-24 |
| 10752991 |
Half-angle nozzle |
— |
2020-08-25 |
| D882536 |
Plasma source liner |
— |
2020-04-28 |
| 10636626 |
Dogbone inlet cone profile for remote plasma oxidation chamber |
Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Hansel LO +1 more |
2020-04-28 |
| 10636650 |
Argon addition to remote plasma oxidation |
Hansel LO, Christopher S. Olsen, Johanes S. Swenberg, Erika HANSEN, Taewan Kim +1 more |
2020-04-28 |
| D875055 |
Plasma connector liner |
— |
2020-02-11 |
| D875054 |
Plasma connector liner |
— |
2020-02-11 |
| D875053 |
Plasma connector liner |
— |
2020-02-11 |
