| 12139790 |
Processing system and method of delivering a reactant gas |
Vishwas Kumar Pandey, Christopher S. Olsen, Rene George, Eric Kihara Shono, Lara Hawrylchak +3 more |
2024-11-12 |
$39,712,000 |
| D1023987 |
Chamber inlet |
Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Agus Sofian Tjandra, Taewan Kim +1 more |
2024-04-23 |
|
| 11959169 |
Asymmetric injection for better wafer uniformity |
Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Kartik Shah, Tobin Kaufman-Osborn +3 more |
2024-04-16 |
$82,852,000 |
| 11732355 |
Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber |
Vishwas Kumar Pandey, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra +2 more |
2023-08-22 |
$40,609,000 |
| 11501954 |
Dogbone inlet cone profile for remote plasma oxidation chamber |
Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Eric Kihara Shono +1 more |
2022-11-15 |
$47,599,000 |
| 11501945 |
Side inject designs for improved radical concentrations |
Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Agus Sofian Tjandra, Taewan Kim +1 more |
2022-11-15 |
$47,599,000 |
| 11486038 |
Asymmetric injection for better wafer uniformity |
Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Kartik Shah, Tobin Kaufman-Osborn +3 more |
2022-11-01 |
$32,150,000 |
| 11081340 |
Argon addition to remote plasma oxidation |
Christopher S. Olsen, Eric Kihara Shono, Johanes S. Swenberg, Erika HANSEN, Taewan Kim +1 more |
2021-08-03 |
$89,613,000 |
| D924825 |
Chamber inlet |
Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Agus Sofian Tjandra, Taewan Kim +1 more |
2021-07-13 |
|
| 11049696 |
Dogbone inlet cone profile for remote plasma oxidation chamber |
Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Eric Kihara Shono +1 more |
2021-06-29 |
$47,858,000 |
| 10847337 |
Side inject designs for improved radical concentrations |
Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Agus Sofian Tjandra, Taewan Kim +1 more |
2020-11-24 |
$38,395,000 |
| 10636626 |
Dogbone inlet cone profile for remote plasma oxidation chamber |
Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Eric Kihara Shono +1 more |
2020-04-28 |
$15,875,000 |
| 10636650 |
Argon addition to remote plasma oxidation |
Christopher S. Olsen, Eric Kihara Shono, Johanes S. Swenberg, Erika HANSEN, Taewan Kim +1 more |
2020-04-28 |
$15,875,000 |
