Issued Patents All Time
Showing 25 most recent of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183559 | Apparatus for temperature control in a substrate processing chamber | Colin John Dickinson, Dinkesh HUDERI SOMANNA, Ala Moradian, Kartik Shah | 2024-12-31 |
| 12139790 | Processing system and method of delivering a reactant gas | Christopher S. Olsen, Rene George, Eric Kihara Shono, Lara Hawrylchak, Erika HANSEN +3 more | 2024-11-12 |
| D1023987 | Chamber inlet | Eric Kihara Shono, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more | 2024-04-23 |
| 11959169 | Asymmetric injection for better wafer uniformity | Eric Kihara Shono, Christopher S. Olsen, Kartik Shah, Hansel LO, Tobin Kaufman-Osborn +3 more | 2024-04-16 |
| 11885021 | Gas supply member with baffle | Kartik Shah, Kailash Pradhan, Sairaju Tallavarjula, Rene George, Eric Kihara Shono +2 more | 2024-01-30 |
| 11732355 | Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber | Eric Kihara Shono, Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Tobin Kaufman-Osborn +2 more | 2023-08-22 |
| 11532463 | Semiconductor processing chamber and methods for cleaning the same | Vinay Prabhakar, Bushra Afzal, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez | 2022-12-20 |
| 11529592 | Gas injector with baffle | Lara Hawrylchak, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen, Sairaju Tallavarjula +4 more | 2022-12-20 |
| 11515132 | Physical vapor deposition processing systems target cooling | Sanjay Bhat, Vibhu Jindal | 2022-11-29 |
| 11501954 | Dogbone inlet cone profile for remote plasma oxidation chamber | Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Hansel LO, Eric Kihara Shono +1 more | 2022-11-15 |
| 11501945 | Side inject designs for improved radical concentrations | Eric Kihara Shono, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more | 2022-11-15 |
| 11486038 | Asymmetric injection for better wafer uniformity | Eric Kihara Shono, Christopher S. Olsen, Kartik Shah, Hansel LO, Tobin Kaufman-Osborn +3 more | 2022-11-01 |
| 11124878 | Gas supply member with baffle | Kartik Shah, Kailash Pradhan, Sairaju Tallavarjula, Rene George, Eric Kihara Shono +2 more | 2021-09-21 |
| 11077410 | Gas injector with baffle | Lara Hawrylchak, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen, Sairaju Tallavarjula +4 more | 2021-08-03 |
| D924825 | Chamber inlet | Eric Kihara Shono, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more | 2021-07-13 |
| 11049696 | Dogbone inlet cone profile for remote plasma oxidation chamber | Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Hansel LO, Eric Kihara Shono +1 more | 2021-06-29 |
| 11037769 | Physical vapor deposition processing systems target cooling | Sanjay Bhat, Vibhu Jindal | 2021-06-15 |
| 10847337 | Side inject designs for improved radical concentrations | Eric Kihara Shono, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more | 2020-11-24 |
| 10808310 | Effective and novel design for lower particle count and better wafer quality by diffusing the flow inside the chamber | Kartik Shah, Edric Tong, Prashanth Vasudeva | 2020-10-20 |
| 10685821 | Physical vapor deposition processing systems target cooling | Sanjay Bhat, Vibhu Jindal | 2020-06-16 |
| 10636626 | Dogbone inlet cone profile for remote plasma oxidation chamber | Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Hansel LO, Eric Kihara Shono +1 more | 2020-04-28 |
| 10619235 | Effective and novel design for lower particle count and better wafer quality by diffusing the flow inside the chamber | Kartik Shah, Edric Tong, Prashanth Vasudeva | 2020-04-14 |
| 10325763 | Physical vapor deposition processing systems target cooling | Wei Wang, Kartik Shah | 2019-06-18 |
| 9297277 | Power plant | Debabrata Mukhopadhyay, Abhishek Agrawal, Nestor Hernandez Sanchez, Donkada Santhosh | 2016-03-29 |
| 9103224 | Compliant plate seal for use with rotating machines and methods of assembling a rotating machine | Ajay Keshava Rao, Hrishikesh Vishvas Deo, Hemant Vinayak Gedam | 2015-08-11 |