Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183559 | Apparatus for temperature control in a substrate processing chamber | Vishwas Kumar Pandey, Colin John Dickinson, Ala Moradian, Kartik Shah | 2024-12-31 |
| 11981989 | Automated temperature controlled substrate support | Robert Hartwig, Brian T. West | 2024-05-14 |
| 11469080 | Magnetron assembly having coolant guide for enhanced target cooling | Brian T. West, Jeonghoon Oh | 2022-10-11 |
| 11056372 | Low temperature biasable substrate support | Brian T. West, Soundarrajan JEMBULINGAM | 2021-07-06 |